Synthesis of Zn–Mg coatings using unbalanced magnetron sputtering and theirs corrosion resistance

2014 ◽  
Vol 259 ◽  
pp. 56-61 ◽  
Author(s):  
JoungHyun La ◽  
SangYul Lee ◽  
SeokJun Hong
Keyword(s):  
Corrosion Resistance ◽  
Magnetron Sputtering ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

The Microstructure and Properties of CrNx Films Synthesized by Unbalanced Magnetron Sputtering

2008 ◽  
Vol 373-374 ◽  
pp. 176-179
Author(s):  
Yan Ping Wu ◽  
Yong Xiang Leng ◽  
Sun Hong ◽  
Sheng Fa Zhu ◽  
Nan Huang ◽  
...  
Keyword(s):  
Residual Stress ◽  
Corrosion Resistance ◽  
Magnetron Sputtering ◽  
Corrosion Properties ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Wear And Corrosion ◽  
Structure Thickness ◽  
Wear And Corrosion Resistance ◽  
N2 Flow Rate

CrNx film was widely used in mechanical engineering field because of its excellent anti-wear and corrosion resistance properties. While most of research was focused on mechanical properties, little attention had been paid to the corrosion resistance and residual stress of CrNx film . In this paper, CrNx films were deposited on silicon wafer (100) and iron substrate by unbalanced magnetron sputtering system (UBMS) at different N2 flow. Then the structure, thickness, residual stress, micro-hardness, wear-resistance and anti-corrosion properties of CrNx films were investigated. The results showed that the phase composition of CrNx films transformed from Cr, single phase Cr2N, Cr2N and CrN coexist to single CrN with the N2 flow rate increasing. The CrNx films composed with Cr2N phase, which deposited at 6 sccm N2 flow, had the highest microhardness and had higher compressive residual stress. Whereas the CrNx films with CrN and Cr2N phase coexist had the best wear and corrosion resistance.

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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