Deposition by magnetron sputtering and characterization of indium tin oxide thin films

2007 ◽  
Vol 515 (16) ◽  
pp. 6489-6492 ◽  
Author(s):  
A.V. Mudryi ◽  
A.V. Ivaniukovich ◽  
A.G. Ulyashin
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films

Characterization of nanocrystalline indium tin oxide thin films prepared by ion beam sputter deposition method

2010 ◽  
Vol 518 (23) ◽  
pp. 6891-6896 ◽  
Author(s):  
S. Venkatachalam ◽  
Hiroshi Nanjo ◽  
Fathy M.B. Hassan ◽  
Kazunori Kawasaki ◽  
Mitsuhiro Kanakubo ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Ion Beam ◽  
Sputter Deposition ◽  
Deposition Method ◽  
Oxide Thin Films ◽  
Ion Beam Sputter Deposition

Preparation and characteristics of Nb-doped indium tin oxide thin films by RF magnetron sputtering

2012 ◽  
Vol 8 (6) ◽  
pp. 460-463 ◽  
Author(s):  
Shi-na Li ◽  
Rui-xin Ma ◽  
Liang-wei He ◽  
Yu-qin Xiao ◽  
Jun-gang Hou ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films

Characteristics of zirconium-doped indium tin oxide thin films deposited by magnetron sputtering

2008 ◽  
Vol 92 (10) ◽  
pp. 1224-1229 ◽  
Author(s):  
Bo Zhang ◽  
Xianping Dong ◽  
Xiaofeng Xu ◽  
Pei Zhao ◽  
Jiansheng Wu
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films

Fabrication and Characterization of Indium Tin Oxide Thin Films on Nanoimprinted Glasses

2008 ◽  
Author(s):  
Yasuyuki Akita ◽  
Yuki Sugimoto ◽  
Makoto Hosaka ◽  
Yushi Kato ◽  
Yusaburo Ono ◽  
...  
Keyword(s):  
Thin Films ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films ◽  
Fabrication And Characterization
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