Low temperature short channel polycrystalline silicon thin film transistors with high reliability for flat panel display

2007 ◽  
Vol 515 (19) ◽  
pp. 7402-7405 ◽  
Author(s):  
Joong-Hyun Park ◽  
In-Hyuk Song ◽  
Min-Koo Han
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Reliability ◽  
Flat Panel Display ◽  
Flat Panel ◽  
Silicon Thin Film ◽  
Short Channel

Reliability of Low Temperature Polycrystalline Silicon Thin-Film Transistors with Ultrathin Gate Oxide

2007 ◽  
Vol 46 (7A) ◽  
pp. 4021-4027 ◽  
Author(s):  
Hitoshi Ueno ◽  
Yuta Sugawara ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Gate Oxide ◽  
Silicon Thin Film

Effective channel length and parasitic resistance determination in non self-aligned low temperature polycrystalline silicon thin film transistors

2009 ◽  
Vol 517 (23) ◽  
pp. 6353-6357 ◽  
Author(s):  
A. Valletta ◽  
M. Rapisarda ◽  
L. Mariucci ◽  
A. Pecora ◽  
G. Fortunato ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Channel Length ◽  
Silicon Thin Film ◽  
Parasitic Resistance ◽  
Effective Channel
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