Diffusion barrier properties of AlMoNbSiTaTiVZr high-entropy alloy layer between copper and silicon

2008 ◽  
Vol 516 (16) ◽  
pp. 5527-5530 ◽  
Author(s):  
Ming-Hung Tsai ◽  
Jien-Wei Yeh ◽  
Jon-Yiew Gan
2021 ◽  
Vol 414 ◽  
pp. 127101 ◽  
Author(s):  
Zhongzhan Xu ◽  
Peng Zhang ◽  
Wei Wang ◽  
Qian Shi ◽  
Hongzhi Yang ◽  
...  

Entropy ◽  
2020 ◽  
Vol 22 (2) ◽  
pp. 234
Author(s):  
Chunxia Jiang ◽  
Rongbin Li ◽  
Xin Wang ◽  
Hailong Shang ◽  
Yong Zhang ◽  
...  

In this study, high-entropy alloy films, namely, AlCrTaTiZr/AlCrTaTiZr-N, were deposited on the n-type (100) silicon substrate. Then, a copper film was deposited on the high-entropy alloy films. The diffusion barrier performance of AlCrTaTiZr/AlCrTaTiZr-N for Cu/Si connect system was investigated after thermal annealing for an hour at 600 °C, 700 °C, 800 °C, and 900 °C. There were no Cu-Si intermetallic compounds generated in the Cu/AlCrTaTiZr/AlCrTaTiZr-N/Si film stacks after annealing even at 900 °C through transmission electron microscopy (TEM) and atomic probe tomography (APT) analysis. The results indicated that AlCrTaTiZr/AlCrTaTiZr-N alloy films can prevent copper diffusion at 900 °C. The reason was investigated in this work. The amorphous structure of the AlCrTaTiZr layer has lower driving force to form intermetallic compounds; the lattice mismatch between the AlCrTaTiZr and AlCrTaTiZ-rN layers increased the diffusion distance of the Cu atoms and the difficulty of the Cu atom diffusion to the Si substrate.


2021 ◽  
Vol 284 ◽  
pp. 128859
Author(s):  
Fuxing Ye ◽  
Yu Yang ◽  
Zhi Lou ◽  
Lingzhi Feng ◽  
Lei Guo ◽  
...  

2013 ◽  
Vol 820 ◽  
pp. 63-66 ◽  
Author(s):  
Bo Zheng ◽  
Qi Bin Liu ◽  
Ling Yan Zhang

To obtain high-entropy alloys (HEAS) coating with excellent properties on Q235 steel, a kind of HEAS powders was designed. The HEAS coating was prepared uniformly on Q235 steel by laser cladding. By means of OM, XRD and microhardness tester, the microstructure and properties of the high-entropy alloy layer were investigated. The experimental results indicate that the phases in the high-entropy alloy coating is mainly MoFeCrTiW with simple BCC, whose lattice parameter is a-3.1256Å. The microstructure in the coating is mainly cellular crystal, on which dispersion precipitates exist. And in the near bottom of the coating, there is few precipitates, in the middle part of coating, the precipitates are larger than that of bottom coating, while in near top of coating, dispersion precipitates become largest. The maximum microhardness value of coating reaches 800HV0.98.


2019 ◽  
Author(s):  
Nirmal Kumar ◽  
Subramanian Nellaiappan ◽  
Ritesh Kumar ◽  
Kirtiman Deo Malviya ◽  
K. G. Pradeep ◽  
...  

<div>Renewable harvesting clean and hydrogen energy using the benefits of novel multicatalytic materials of high entropy alloy (HEA equimolar Cu-Ag-Au-Pt-Pd) from formic acid with minimum energy input has been achieved in the present investigation. The synthesis effect of pristine elements in the HEA drives the electro-oxidation reaction towards non-carbonaceous pathway . The atomistic simulation based on DFT rationalize the distinct lowering of the d-band center for the individual atoms in the HEA as compared to the pristine counterparts. This catalytic activity of the HEA has also been extended to methanol electro-oxidation to show the unique capability of the novel catalyst. The nanostructured HEA, properties using a combination of casting and cry omilling techniques can further be utilized as fuel cell anode in direct formic acid/methanol fuel cells (DFFE).<br></div>


Author(s):  
Janez Dolinšek ◽  
Stanislav Vrtnik ◽  
J. Lužnik ◽  
P. Koželj ◽  
M. Feuerbacher

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