A comparison of different spray chemical vapour deposition methods for the production of undoped ZnO thin films

2009 ◽  
Vol 518 (4) ◽  
pp. 1129-1135 ◽  
Author(s):  
Jérôme Garnier ◽  
Anne Bouteville ◽  
Jeff Hamilton ◽  
Martyn E. Pemble ◽  
Ian M. Povey
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films

scholarly journals Aluminium/gallium, indium/gallium, and aluminium/indium co-doped ZnO thin films deposited via aerosol assisted CVD

2018 ◽  
Vol 6 (3) ◽  
pp. 588-597 ◽  
Author(s):  
Dominic B. Potter ◽  
Michael J. Powell ◽  
Ivan P. Parkin ◽  
Claire J. Carmalt
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Glass Substrates ◽  
Doped Zno ◽  
Indium Gallium ◽  
Co Doped

Aluminium/gallium co-doped ZnO (AGZO), indium/gallium co-doped ZnO (IGZO), and aluminium/indium co-doped ZnO (AIZO) thin films were synthesised on glass substrates via aerosol assisted chemical vapour deposition (AACVD).

Aerosol assisted chemical vapour deposition of transparent conductive ZnO thin films with hexagonal microplate surfaces and ultrahigh haze values

2015 ◽  
Vol 3 (44) ◽  
pp. 22311-22315 ◽  
Author(s):  
Shuqun Chen ◽  
Martyn McLachlan ◽  
Andrei Sapelkin ◽  
Russell Binions
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Silica Glass ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Textured Surfaces ◽  
Glass Substrates

Aerosol assisted chemical vapour deposition has been used to fabricate transparent conductive ZnO thin films with highly hexagonal, textured surfaces and ultra high haze on silica glass substrates.

scholarly journals Photocatalytic and electrically conductive transparent Cl-doped ZnO thin films via aerosol-assisted chemical vapour deposition

2018 ◽  
Vol 6 (26) ◽  
pp. 12682-12692 ◽  
Author(s):  
Arreerat Jiamprasertboon ◽  
Michael J. Powell ◽  
Sebastian C. Dixon ◽  
Raul Quesada-Cabrera ◽  
Abdullah M. Alotaibi ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Zno Films ◽  
Electrically Conductive ◽  
Doped Zno

Cl-doped ZnO films, grown via aerosol-assisted CVD, can function as both TCOs and photocatalysts.

scholarly journals Transparent conductive aluminium and fluorine co-doped zinc oxide films via aerosol assisted chemical vapour deposition

RSC Advances ◽  
2014 ◽  
Vol 4 (91) ◽  
pp. 49723-49728 ◽  
Author(s):  
Sapna D. Ponja ◽  
Sanjayan Sathasivam ◽  
Ivan P. Parkin ◽  
Claire J. Carmalt
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Glass Substrates ◽  
Zinc Oxide Films ◽  
Doped Zno ◽  
Co Doped

Aerosol assisted chemical vapour deposition (AACVD) was employed to synthesise highly transparent and conductive ZnO, fluorine or aluminium doped and aluminium–fluorine co-doped ZnO thin films on glass substrates at 450 °C.

scholarly journals Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal-organic chemical vapour deposition through the flow rate adjustment

2021 ◽  
Author(s):  
Quang Chieu Bui ◽  
Gustavo Ardilo ◽  
Hervé Roussel ◽  
Carmen Jiménez ◽  
Isabelle Gélard ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Piezoelectric Response ◽  
Zno Thin Films ◽  
Organic Chemical ◽  
Liquid Injection ◽  
Rate Adjustment ◽  
Metal Organic

The formation process of ZnO thin films grown by pulsed-liquid injection metal–organic chemical vapour deposition (PLI-MOCVD) has a major impact on its morphological, structural, electrical and piezoelectric properties, but their...

scholarly journals The effect of solvent on Al-doped ZnO thin films depositedviaaerosol assisted CVD

RSC Advances ◽  
2018 ◽  
Vol 8 (58) ◽  
pp. 33164-33173 ◽  
Author(s):  
Dominic B. Potter ◽  
Ivan P. Parkin ◽  
Claire J. Carmalt
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Effect Of Solvent ◽  
Zinc Acetylacetonate ◽  
Doped Zno

Aluminium-doped zinc oxide (AZO) thin films were depositedviaaerosol assisted chemical vapour deposition (AACVD) from zinc acetylacetonate at 450 °C.

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