Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor

Silicon Nitride ◽

Radio Frequency ◽

Optical Fibers ◽

Vapor Deposition ◽

Chemical Vapor ◽

Fiber Suspension ◽

Radio Frequency Plasma ◽

Chemical Vapor Deposition Reactor ◽

Characteristics of carbon coatings on optical fibers prepared by radio-frequency plasma enhanced chemical vapor deposition with different H2/C2H2 ratios

Thin Solid Films ◽

10.1016/j.tsf.2010.05.030 ◽

2010 ◽

Vol 518 (24) ◽

pp. 7492-7496 ◽

Cited By ~ 1

Author(s):

Hung-Chien Lin ◽

Jen-Feng Yu ◽

Sham-Tsong Shiue ◽

Hung-Yi Lin

Keyword(s):

Radio Frequency ◽

Optical Fibers ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Coatings ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

New in situ measurement method for nanoparticles formed in a radio frequency plasma-enhanced chemical vapor deposition reactor

10.1116/1.1404979 ◽

2001 ◽

Vol 19 (5) ◽

pp. 1998 ◽

Cited By ~ 18

Author(s):

Kwang Soo Seol ◽

Yasuyuki Tsutatani ◽

Toshiyuki Fujimoto ◽

Yoshiki Okada ◽

Kazuo Takeuchi ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Measurement Method ◽

Chemical Vapor ◽

In Situ Measurement ◽

Radio Frequency Plasma ◽

Chemical Vapor Deposition Reactor ◽

Effect of Sample Elevation in Radio Frequency Plasma Enhanced Chemical Vapor Deposition (RF PECVD) Reactor on Optical Properties and Deposition Rate of Silicon Nitride Thin Films

Materials ◽

10.3390/ma7021249 ◽

2014 ◽

Vol 7 (2) ◽

pp. 1249-1260 ◽

Cited By ~ 5

Author(s):

Mateusz Śmietana ◽

Robert Mroczyński ◽

Norbert Kwietniewski

Keyword(s):

Thin Films ◽

Optical Properties ◽

Silicon Nitride ◽

Radio Frequency ◽

Deposition Rate ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽

10.1016/j.carbon.2004.06.035 ◽

2004 ◽

Vol 42 (14) ◽

pp. 2867-2872 ◽

Cited By ~ 332

Author(s):

Jianjun Wang ◽

Mingyao Zhu ◽

Ron A. Outlaw ◽

Xin Zhao ◽

Dennis M. Manos ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Nanosheets ◽

Inductively Coupled ◽

GROWING CARBON BUCKONIONS BY RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Acta Physica Sinica ◽

10.7498/aps.50.1264 ◽

2001 ◽

Vol 50 (7) ◽

pp. 1264

Author(s):

CHEN XIAO-HUA ◽

WU GUO-TAO ◽

DENG FU-MING ◽

WANG JIAN-XIONG ◽

YANG HANG-SHENG ◽

...

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology ◽

10.6111/jkcgct.2012.22.4.190 ◽

2012 ◽

Vol 22 (4) ◽

pp. 190-193 ◽

Cited By ~ 4

Author(s):

Tae-Gyu Kim ◽

Yeong-Ho Shin ◽

Hyun Cho ◽

Jin-Kon Kim

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Diamond Like Carbon Film ◽

Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.2817 ◽

1997 ◽

Vol 36 (Part 1, No. 5A) ◽

pp. 2817-2821 ◽

Cited By ~ 6

Author(s):

Hiroshi Inaba ◽

Yuuichi Kokaku ◽

Masatomo Terakado ◽

Hiroyuki Kataoka

Keyword(s):

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Synthesis of carbon nanosheets and carbon nanotubes by radio frequency plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2006.05.007 ◽

2007 ◽

Vol 16 (2) ◽

pp. 196-201 ◽

Cited By ~ 54

Author(s):

Mingyao Zhu ◽

Jianjun Wang ◽

Ronald A. Outlaw ◽

Kun Hou ◽

Dennis M. Manos ◽

...

Keyword(s):

Carbon Nanotubes ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Nanosheets ◽

Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.112 ◽

2011 ◽

Vol 257 (23) ◽

pp. 9717-9723 ◽

Cited By ~ 24

Author(s):

Sumita Mukhopadhyay ◽

Swati Ray

Keyword(s):

Radio Frequency ◽

Structural Properties ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Photovoltaic Properties of Boron-Incorporated Amorphous Carbon on n-Si Heterojunction Grown by Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Using Trimethylboron

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l273 ◽

2003 ◽

Vol 42 (Part 2, No. 3B) ◽

pp. L273-L276 ◽

Cited By ~ 3

Author(s):

Yasuhiko Hayashi ◽

Tetsuo Soga ◽

Takashi Jimbo

Keyword(s):

Radio Frequency ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Photovoltaic Properties ◽