Effects of post deposition annealing atmosphere on interfacial and electrical properties of HfO2/Ge3N4 gate stacks

2019 ◽  
Vol 675 ◽  
pp. 16-22 ◽  
Author(s):  
Kumar Mallem ◽  
S.V. Jagadeesh Chandra ◽  
Minkyu Ju ◽  
Subhajit Dutta ◽  
Swagata Phanchanan ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Annealing Atmosphere ◽  
Gate Stacks ◽  
Post Deposition Annealing ◽  
Post Deposition

Effects of Post-Deposition Annealing on the Electrical Properties of HfSiO Films Grown by Atomic Layer Deposition

2005 ◽  
Vol 44 (4B) ◽  
pp. 2230-2234 ◽  
Author(s):  
Hag-Ju Cho ◽  
Hye Lan Lee ◽  
Hong Bae Park ◽  
Taek Soo Jeon ◽  
Seong Geon Park ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Post Deposition Annealing ◽  
Layer Deposition ◽  
Post Deposition

scholarly journals The effect of post-deposition annealing conditions on structural and thermoelectric properties of sputtered copper oxide films

RSC Advances ◽  
2020 ◽  
Vol 10 (49) ◽  
pp. 29394-29401
Author(s):  
Chandrasekaran Abinaya ◽  
Kevin Bethke ◽  
Virgil Andrei ◽  
Jonas Baumann ◽  
Beatrix Pollakowski-Herrmann ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Thermoelectric Properties ◽  
Oxide Films ◽  
Thermoelectric Performance ◽  
Annealing Atmosphere ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Annealing Conditions ◽  
Post Deposition

This study reveals the interplay between the composition and thermoelectric performance of mixed copper oxide thin films, which can be finely adjusted by varying the annealing atmosphere.

Post deposition annealing effect on the electrical properties of β-Ga2O3 Nanowire

2020 ◽  
Vol 31 (22) ◽  
pp. 20378-20386
Author(s):  
Shagolsem Romeo Meitei ◽  
Rajshree Rajkumari ◽  
Naorem Khelchand Singh
Keyword(s):  
Electrical Properties ◽  
Annealing Effect ◽  
Post Deposition Annealing ◽  
Post Deposition
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