Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
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1992 ◽
Vol 10
(4)
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pp. 1804-1808
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2017 ◽
Vol 27
(4)
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pp. 1-5
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2001 ◽
Vol 146-147
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pp. 189-194
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1996 ◽
Vol 80
(1-2)
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pp. 190-194
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