Diagnostics of dual source reactive magnetron sputter deposition of aluminum nitride and zirconium nitride thin films

1992 ◽  
Vol 10 (4) ◽  
pp. 1804-1808 ◽  
Author(s):  
Jeffrey A. Sell ◽  
W. J. Meng ◽  
Thomas A. Perry
Keyword(s):  
Thin Films ◽  
Aluminum Nitride ◽  
Sputter Deposition ◽  
Zirconium Nitride ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Dual Source ◽  
Magnetron Sputter

scholarly journals Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Vacuum ◽  
1995 ◽  
Vol 46 (12) ◽  
pp. 1385-1390 ◽  
Author(s):  
MF Cerqueira ◽  
M Andritschky ◽  
L Rebouta ◽  
JA Ferreira ◽  
MF da Silva
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Silicon Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

2020 ◽  
Vol 693 ◽  
pp. 137685 ◽  
Author(s):  
Kristina von Fieandt ◽  
Eirini-Maria Paschalidou ◽  
Aishwarya Srinath ◽  
Pavel Soucek ◽  
Lars Riekehr ◽  
...  
Keyword(s):  
Thin Films ◽  
Corrosion Resistance ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Structure and Mechanical Properties of Titanium Nitride, Zirconium Nitride, and Chromium Nitride Films by Reactive Magnetron-Sputter Deposition

1996 ◽  
Vol 458 ◽  
Author(s):  
W.-H. Soe ◽  
T. Kitagaki ◽  
H. Ueda ◽  
N. Shima ◽  
M. Otsuka ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Sputter Deposition ◽  
Zirconium Nitride ◽  
Chromium Nitride ◽  
Reactive Magnetron ◽  
Nano Indentation ◽  
Low Load ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Hardness Values

ABSTRACTTiN, ZrN, and CrN films were grown by reactive magnetron sputtering on WC-Co sintered hard alloy substrates. Hardness and elastic modulus were measured by nano-indentation tester with low load on tip at 200 mgf. Hardness values were shown the higher value the thinner film thickness due to stress in the films.

scholarly journals Reactive Magnetron Sputter Deposition of Superconducting Niobium Titanium Nitride Thin Films With Different Target Sizes

2017 ◽  
Vol 27 (4) ◽  
pp. 1-5 ◽  
Author(s):  
Boy Gustaaf Cornelis Bos ◽  
David Johannes Thoen ◽  
E. A. F. Haalebos ◽  
P. M. L. Gimbel ◽  
T. M. Klapwijk ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Niobium Titanium ◽  
Magnetron Sputter
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