Effects of pulse power and argon flux flow rate on mechanical and tribological properties of diamond-like carbon coatings prepared using high power impulse magnetron sputtering technology

2020 ◽  
Vol 693 ◽  
pp. 137712 ◽  
Author(s):  
W.H. Kao ◽  
Y.L. Su ◽  
J.H. Horng ◽  
C.C. Yu
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Flow Rate ◽  
High Power ◽  
Pulse Power ◽  
Diamond Like Carbon ◽  
Flux Flow ◽  
Carbon Coatings ◽  
Mechanical And Tribological Properties

Tribological properties of diamond-like carbon coatings prepared by anode layer source and magnetron sputtering

2011 ◽  
Vol 205 ◽  
pp. S99-S102 ◽  
Author(s):  
S. Paskvale ◽  
M. Kahn ◽  
M. Čekada ◽  
P. Panjan ◽  
W. Waldhauser ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Diamond Like Carbon ◽  
Anode Layer ◽  
Carbon Coatings

scholarly journals Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne

Coatings ◽  
2018 ◽  
Vol 8 (11) ◽  
pp. 385 ◽  
Author(s):  
Asim Aijaz ◽  
Fabio Ferreira ◽  
Joao Oliveira ◽  
Tomas Kubart
Keyword(s):  
Thin Films ◽  
Wear Rate ◽  
Magnetron Sputtering ◽  
High Power ◽  
Mass Density ◽  
Industrial Applications ◽  
Diamond Like Carbon ◽  
Mechanical And Tribological Properties ◽  
Process Gas ◽  
Wide Range

Hydrogen-free diamond-like carbon (DLC) thin films are attractive for a wide range of industrial applications. One of the challenges related to the use of hard DLC lies in the high intrinsic compressive stresses that limit the film adhesion. Here, we report on the mechanical and tribological properties of DLC films deposited by High Power Impulse Magnetron Sputtering (HiPIMS) with Ne as the process gas. In contrast to standard magnetron sputtering as well as standard Ar-based HiPIMS process, the Ne-HiPIMS lead to dense DLC films with increased mass density (up to 2.65 g/cm3) and a hardness of 23 GPa when deposited on steel with a Cr + CrN adhesion interlayer. Tribological testing by the pin-on-disk method revealed a friction coefficient of 0.22 against steel and a wear rate of 2 × 10−17 m3/Nm. The wear rate is about an order of magnitude lower than that of the films deposited using Ar. The differences in the film properties are attributed to an enhanced C ionization in the Ne-HiPIMS discharge.

Mechanical and Tribological Properties of Diamond-Like Carbon Coatings with Different Ni Content

2012 ◽  
Vol 532-533 ◽  
pp. 131-134
Author(s):  
Xiao Ling ◽  
Shu Rong Yu ◽  
Jun Yan Zhang
Keyword(s):  
Mechanical Properties ◽  
Raman Spectroscopy ◽  
Friction Coefficient ◽  
Tribological Properties ◽  
Diamond Like Carbon ◽  
Carbon Coatings ◽  
Nano Indentation ◽  
Mechanical And Tribological Properties ◽  
Ni Content ◽  
Ball On Disc

Ni-doped diamond-like carbon coatings were deposited on silicon wafer by magnetron sputtering. The Ni content was controlled by changing the Ni target current. The Ni content, mechanical properties and tribological properties of the coatings were systematically studied by Raman spectroscopy, nano-indentation and ball-on-disc tester. The highest hardness and internal stress are obtained at the Ni content of 2.3%. The friction coefficient and wear rate lower with the decreased of the Ni content, which may be responsible for the excellent tribological properties.

High power impulse magnetron sputtering of diamond-like carbon coatings

2020 ◽  
Vol 38 (4) ◽  
pp. 043408 ◽  
Author(s):  
Tomas Kubart ◽  
Asim Aijaz ◽  
Joakim Andersson ◽  
Fabio Ferreira ◽  
João Carlos Oliveira ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Diamond Like Carbon ◽  
Carbon Coatings
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