Influence of bilayers period on mechanical properties of TaNx/TaCx multilayers obtained by direct current magnetron sputtering

2021 ◽  
pp. 138845
Author(s):  
K.P. Valdez ◽  
H.A. Castillo ◽  
J.H. Quintero-Orozco ◽  
E. Restrepo-Parra ◽  
Wencel de la Cruz
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Direct Current Magnetron Sputtering

THICKNESS DEPENDENCE OF BUCKLING PATTERNS OF Ta FILMS SPUTTERED ON GLASS SUBSTRATES

2012 ◽  
Vol 19 (03) ◽  
pp. 1250022 ◽  
Author(s):  
YONG-JU ZHANG ◽  
SEN-JIANG YU ◽  
HONG ZHOU ◽  
MIAO-GEN CHEN ◽  
ZHI-WEI JIAO
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Film Thickness ◽  
Compressive Stress ◽  
Direct Current ◽  
Thickness Dependence ◽  
Elastic Theory ◽  
Geometrical Parameters ◽  
Glass Substrates ◽  
Direct Current Magnetron Sputtering

Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases, the buckling morphologies evolve from straight-sided buckle network to wavy or wormlike wrinkles gradually, and finally change into telephone cord buckles. The geometrical parameters of the buckling patterns are found to increase linearly with the film thickness. Based on the geometrical parameters of the buckling patterns, the mechanical properties of the Ta films are also discussed in the frame of continuum elastic theory.

Nano-Scratch Response of Diamond-Like Carbon Film Deposited by Pulsed Direct Current Magnetron Sputtering

2020 ◽  
Vol 8 (2) ◽  
pp. 19-37 ◽  
Author(s):  
T. Koch ◽  
M. Lackner ◽  
A. Pauschitz ◽  
Manish Roy
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Carbon Film ◽  
Structural Disorder ◽  
High Load ◽  
Diamond Like Carbon ◽  
Low Load ◽  
Direct Current Magnetron Sputtering ◽  
Pulsed Direct Current

Diamond-like carbon (DLC) films are known for thermal, chemical and mechanical properties. Hydrogen free and hydrogenated DLC films are deposited using pulsed direct current magnetron sputtering. The influence of sputtering conditions on the nano-scratch properties of these films is investigated. Raman spectra reveals that structural disorder in the a-C:H matrix decreases with increase in acetylene flow. Increased acetylene flow reduces frictions, residual stress and retains hardness. The friction responses of the deposited defects free ultra-smooth films are influenced by pull off forces at low load and by formation of carbonaceous layer at high load.

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