THICKNESS DEPENDENCE OF BUCKLING PATTERNS OF Ta FILMS SPUTTERED ON GLASS SUBSTRATES

Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases, the buckling morphologies evolve from straight-sided buckle network to wavy or wormlike wrinkles gradually, and finally change into telephone cord buckles. The geometrical parameters of the buckling patterns are found to increase linearly with the film thickness. Based on the geometrical parameters of the buckling patterns, the mechanical properties of the Ta films are also discussed in the frame of continuum elastic theory.