Oxygen Flow Rate Effect on Copper Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.139013 ◽

2021 ◽

pp. 139013

Author(s):

Rabah TADJINE ◽

Amina HOUIMI ◽

Mohamed Mounes ALIM ◽

Noureddine OUDINI

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Copper Oxide ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Rate Effect ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Flow Rate Effect

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Effect of oxygen flow rate on properties of Cu4O3 thin films fabricated by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.5144205 ◽

2020 ◽

Vol 127 (8) ◽

pp. 085302 ◽

Author(s):

Md Abdul Majed Patwary ◽

Chun Yuen Ho ◽

Katsuhiko Saito ◽

Qixin Guo ◽

Kin Man Yu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Effect Of Oxygen

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Influence of oxygen flow rate and substrate positions on properties of Cu-oxide thin films fabricated by radio frequency magnetron sputtering using pure Cu target

Thin Solid Films ◽

10.1016/j.tsf.2019.02.026 ◽

2019 ◽

Vol 675 ◽

pp. 59-65 ◽

Author(s):

Md Abdul Majed Patwary ◽

Katsuhiko Saito ◽

Qixin Guo ◽

Tooru Tanaka

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Oxide Thin Films ◽

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Effect of oxygen flow rate and radio-frequency power on the photoconductivity of highly ultraviolet sensitive ZnO thin films grown by magnetron sputtering

Materials Research Bulletin ◽

10.1016/j.materresbull.2011.07.019 ◽

2011 ◽

Vol 46 (11) ◽

pp. 1975-1979 ◽

Author(s):

T. Ghosh ◽

D. Basak

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Power ◽

Oxygen Flow ◽

Zno Thin Films ◽

Effect Of Oxygen ◽

Frequency Power

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Effect of oxygen flow rate on the ultraviolet sensing properties of zinc oxide nanocolumn arrays grown by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2015.11.083 ◽

2016 ◽

Vol 42 (3) ◽

pp. 4107-4119 ◽

Author(s):

M.H. Mamat ◽

M.F. Malek ◽

N.N. Hafizah ◽

M.N. Asiah ◽

A.B. Suriani ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Radio Frequency Magnetron ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Sensing Properties ◽

Effect Of Oxygen

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Influence of oxygen flow rate on structural, optical and electrical properties of copper oxide thin films prepared by reactive magnetron sputtering

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/211/1/012025 ◽

2017 ◽

Vol 211 ◽

pp. 012025 ◽

Author(s):

Thitinai Gaewdang ◽

Ngamnit Wongcharoen

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Reactive Magnetron Sputtering ◽

Oxygen Flow ◽

Optical And Electrical Properties ◽

Reactive Magnetron

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Effect of Oxygen Flow Rate in Zinc Oxide Radio Frequency Magnetron Sputtering on the Structural and Optical Properties of ZnO|PEDOT:PSS Inorganic|Organic Hetero-Junction

Semiconductors ◽

10.1134/s1063782620080151 ◽

2020 ◽

Vol 54 (8) ◽

pp. 844-852

Author(s):

B. Boroomand Nasab ◽

A. Kosarian ◽

N. Alaei Sheini

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties ◽

Effect Of Oxygen

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The influence of rf power and oxygen flow rate during deposition on the optical transmittance of copper oxide thin films prepared by reactive magnetron sputtering

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/2/011 ◽

2005 ◽

Vol 38 (2) ◽

pp. 266-271 ◽

Author(s):

A A Ogwu ◽

E Bouquerel ◽

O Ademosu ◽

S Moh ◽

E Crossan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Copper Oxide ◽

Flow Rate ◽

Optical Transmittance ◽

Oxygen Flow Rate ◽

Reactive Magnetron Sputtering ◽

Oxygen Flow ◽

Reactive Magnetron ◽

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Room temperature ammonia gas sensing characteristics of copper oxide-tin oxide composite thin films prepared by radio frequency magnetron sputtering technique

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-020-04353-z ◽

2020 ◽

Vol 31 (20) ◽

pp. 18018-18036

Author(s):

S. R. Cynthia ◽

R. Sivakumar ◽

C. Sanjeeviraja ◽

C. Gopalakrishnan ◽

K. Jeyadheepan

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Copper Oxide ◽

Tin Oxide ◽

Room Temperature ◽

Gas Sensing ◽

Radio Frequency Magnetron Sputtering ◽

Ammonia Gas ◽

Sensing Characteristics

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Influence of oxygen flow rate on metal–insulator transition of vanadium oxide thin films grown by RF magnetron sputtering

Applied Physics A ◽

10.1007/s00339-017-0779-7 ◽

2017 ◽

Vol 123 (3) ◽

Author(s):

Xu Ma ◽

Xinkun Liu ◽

Haizhu Li ◽

Angran Zhang ◽

Mingju Huang

Keyword(s):

Magnetron Sputtering ◽

Vanadium Oxide ◽

Flow Rate ◽

Rf Magnetron Sputtering ◽

Oxygen Flow Rate ◽

Oxygen Flow ◽

Metal Insulator Transition ◽

Metal Insulator ◽

Vanadium Oxide Thin Films

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Role of oxygen flow rate on the structural and optical properties of copper oxide thin films grown by reactive magnetron sputtering

Indian Journal of Physics ◽

10.1007/s12648-015-0745-1 ◽

2015 ◽

Vol 90 (2) ◽

pp. 219-224 ◽

Author(s):

M Ali ◽

C R Gobinner ◽

D Kekuda

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Copper Oxide ◽

Flow Rate ◽

Oxygen Flow Rate ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Structural And Optical Properties

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