Sputtering yields of boron bombarded by light ions

Vacuum ◽  
1980 ◽  
Vol 30 (1) ◽  
pp. 40
Keyword(s):  
Light Ions ◽  
Sputtering Yields

Sputtering yields for light ions as a function of angle of incidence

1979 ◽  
Vol 19 (4) ◽  
pp. 421-426 ◽  
Author(s):  
H. L. Bay ◽  
J. Bohdansky
Keyword(s):  
Angle Of Incidence ◽  
Light Ions ◽  
Sputtering Yields

Sputtering yields of boron bombarded by light ions

1978 ◽  
Vol 49 (12) ◽  
pp. 6194-6196 ◽  
Author(s):  
S. Miyagawa ◽  
Y. Ato ◽  
Y. Moriya
Keyword(s):  
Light Ions ◽  
Sputtering Yields

Sputtering yields of 1 to 20 kev light ions on stainless steel

1976 ◽  
Vol 63 ◽  
pp. 215-221 ◽  
Author(s):  
H. Von Seefeld ◽  
H. Schmidl ◽  
R. Behrisch ◽  
B.M.U. Scherzer
Keyword(s):  
Stainless Steel ◽  
Light Ions ◽  
Sputtering Yields

scholarly journals Calculation of the sputtering coefficients of oxide films from the surface of a homogeneous material by medium-energy helium ions

2021 ◽  
pp. 59-64
Author(s):  
Vladimir Manukhin
Keyword(s):  
Analytical Formula ◽  
Homogeneous Material ◽  
Medium Energy ◽  
Simulation Data ◽  
Two Component ◽  
Light Ions ◽  
Calculation Results ◽  
Computer Simulation Data ◽  
Sputtering Yields ◽  
Good Agreement

The paper presents an analytical model for sputtering two-component layered inhomogeneous targets by bombardment with light ions. An analytical formula is obtained that makes it possible to calculate the total and partial sputtering yields of a binary layer of target inhomogeneity by light ions. The obtained formula is used to calculate the sputtering yields of oxide layers from the surface of a homogeneous substrate. The calculation results are in good agreement with the computer simulation data.

scholarly journals Sputtering yields and surface chemical modification of tin-doped indium oxide in hydrocarbon-based plasma etching

2015 ◽  
Vol 33 (6) ◽  
pp. 060606 ◽  
Author(s):  
Hu Li ◽  
Kazuhiro Karahashi ◽  
Masanaga Fukasawa ◽  
Kazunori Nagahata ◽  
Tetsuya Tatsumi ◽  
...  
Keyword(s):  
Chemical Modification ◽  
Indium Oxide ◽  
Plasma Etching ◽  
Surface Chemical ◽  
Sputtering Yields ◽  
Surface Chemical Modification

Response of a plastic scintillator detector to light ions with energies up to hundreds of MeV

1985 ◽  
Vol 239 (3) ◽  
pp. 527-528 ◽  
Author(s):  
P.V. Degtyarenko ◽  
E.A. Doroshkevitch ◽  
Yu.V. Efremenko ◽  
V.B. Gavrilov ◽  
F.M. Khassanov ◽  
...  
Keyword(s):  
Plastic Scintillator ◽  
Light Ions ◽  
Scintillator Detector

scholarly journals Ion-induced ionization and capture cross sections for DNA nucleobases impacted by light ions

2012 ◽  
Vol 388 (10) ◽  
pp. 102004
Author(s):  
Christophe Champion ◽  
Mariel E Galassi ◽  
Philippe F Weck ◽  
Omar Fojón ◽  
Jocelyn Hanssen ◽  
...  
Keyword(s):  
Cross Sections ◽  
Capture Cross ◽  
Light Ions ◽  
Dna Nucleobases ◽  
Capture Cross Sections
Sign in / Sign up

Export Citation Format

Share Document