Calculation of the sputtering coefficients of oxide films from the surface of a homogeneous material by medium-energy helium ions
Keyword(s):
The paper presents an analytical model for sputtering two-component layered inhomogeneous targets by bombardment with light ions. An analytical formula is obtained that makes it possible to calculate the total and partial sputtering yields of a binary layer of target inhomogeneity by light ions. The obtained formula is used to calculate the sputtering yields of oxide layers from the surface of a homogeneous substrate. The calculation results are in good agreement with the computer simulation data.
1993 ◽
Vol 50
(3)
◽
pp. 359-367
◽
1984 ◽
Vol 106
(2)
◽
pp. 306-312
2012 ◽
Vol 535-537
◽
pp. 697-700
Keyword(s):
2021 ◽
2011 ◽
Vol 287-290
◽
pp. 1896-1901