Determination of thin film hardness for a film/substrate system

2001 ◽  
Vol 27 (4) ◽  
pp. 385-389 ◽  
Author(s):  
H.L. Wang ◽  
M.J. Chiang ◽  
M.H. Hon
Keyword(s):  
Thin Film ◽  
Film Hardness ◽  
Film Substrate

On the determination of the film hardness in hard film/substrate composites using depth-sensing indentation

2013 ◽  
Vol 39 (6) ◽  
pp. 6251-6263 ◽  
Author(s):  
N.A. Sakharova ◽  
M.C. Oliveira ◽  
J.M. Antunes ◽  
J.V. Fernandes
Keyword(s):  
Depth Sensing ◽  
Film Hardness ◽  
Film Substrate

Non-Contact Real-Time Evaluation of Polyimide Thin Film Thermoelastic Properties Through Impulsive Stimulated Thermal Scattering

1992 ◽  
Vol 284 ◽  
Author(s):  
J. A. Rogers ◽  
A. R. Duggal ◽  
K. A. Nelson
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Real Time ◽  
Viscoelastic Properties ◽  
Thermoelastic Properties ◽  
Substrate Adhesion ◽  
Thermal Scattering ◽  
Film Substrate ◽  
Time Evaluation

ABSTRACTWe demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of unsupported and silicon supported polyimide thin (∼1 micron) films. We show how this technique can be used to detect film delaminations and suggest how it may be used to probe film-substrate adhesion quality.

Determination of elastic modulus of thin layers using nanoindentation

1997 ◽  
Vol 12 (9) ◽  
pp. 2475-2484 ◽  
Author(s):  
J. Menčík ◽  
D. Munz ◽  
E. Quandt ◽  
E. R. Weppelmann ◽  
M. V. Swain
Keyword(s):  
Thin Film ◽  
Experimental Data ◽  
Elastic Modulus ◽  
Linear Function ◽  
Thin Layers ◽  
Film Substrate ◽  
Comparison Of The Results ◽  
Practical Recommendations ◽  
Indentation Response

Elastic modulus of thin homogeneous films can be determined by indenting the specimen to various depths and extrapolating the measured (apparent) E-values to zero penetration. The paper shows the application of five approximation functions for this purpose: linear, exponential, reciprocal exponential, Gao's, and the Doerner and Nix functions. Comparison of the results for 26 film/substrate combinations has shown that the indentation response of film/substrate composites can, in general, be described by the Gao analytical function. In determining the thin film modulus from experimental data, satisfactory results can also be obtained with the exponential function, while linear function may be used only for thick films where the relative depths of penetration are small. The article explains the pertinent procedures and gives practical recommendations for the testing.

Effects of the Substrate on the Determination of SEBS Thin Film Mechanical Properties by Nanoindentation

2006 ◽  
Vol 315-316 ◽  
pp. 766-769
Author(s):  
Yong Zhi Cao ◽  
Ying Chun Liang ◽  
Shen Dong ◽  
T. Sun ◽  
Bo Wang
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Polymer Film ◽  
Young’S Modulus ◽  
Penetration Depth ◽  
Young's Modulus ◽  
Polymer Film Substrate ◽  
Film Substrate ◽  
Composite Hardness

In order to investigate nanoindentation data of polymer film-substrate systems and to learn more about the mechanical properties of polymer film-substrate systems, SEBS (styreneethylene/ butylene-styrene) triblock copolymer thin film on different substrate systems have been tested with a systematic variation in penetration depth and substrate characteristics. Nanoindentation experiments were performed using a Hysitron TriboIndenter with a Berkvoich tip. The resulting data were analyzed in terms of load-displacement curves and various comparative parameters, such as hardness and Young’s modulus. The results obtained by the Oliver and Pharr method show how the composite hardness and Young’s modulus are different for different substrates and different penetration depth.

Photoacoustic elastic bending in thin film–substrate system: Experimental determination of the thin film parameters

2014 ◽  
Vol 116 (5) ◽  
pp. 053506 ◽  
Author(s):  
D. M. Todorović ◽  
M. D. Rabasović ◽  
D. D. Markushev ◽  
M. Sarajlić
Keyword(s):  
Thin Film ◽  
Experimental Determination ◽  
Elastic Bending ◽  
Film Substrate

Determination of the Optical Constants of Gallium Oxide Films

2014 ◽  
Vol 986-987 ◽  
pp. 42-46
Author(s):  
Chang Long Sun ◽  
Zhen Ping Wu ◽  
Shi Jie Lu ◽  
Zhen Ren ◽  
Yue Hua An ◽  
...  
Keyword(s):  
Thin Film ◽  
Refractive Index ◽  
Transmission Spectrum ◽  
Optical Constants ◽  
Reflectance Spectrum ◽  
Spectrum Measurement ◽  
Dispersion Constant ◽  
Influence Of Substrate ◽  
Film Substrate

Transmission spectrum and reflectance spectrum have long been used to characterize gap semiconductor. Transmission spectrum can be measured very directly, but the influence of substrate absorption is often unavoidable. However, when using the reflectance spectrum measurement, the absorption of thin film, substrate absorption, and coherent interference will make the reflectance spectrum much more complicated. In this paper, Considering the absorption of thin film, substrate absorption, and coherent interference, we use the envelope curves algorithm to achieve the calculation formula of refractive index deduced from the reflectance spectrum. Through the analysis of the reflectance spectrum of Ga2O3film, we achieved thickness of the film, refractive index, extinction and absorption coefficient and dispersion constant.

Microtomy of spherical Al2O3 powders

1983 ◽  
Vol 41 ◽  
pp. 74-75
Author(s):  
E.J. Jenkins ◽  
D.S. Tucker ◽  
J.J. Hren
Keyword(s):  
Thin Film ◽  
Size Range ◽  
Particle Aggregation ◽  
Ion Milling ◽  
Thin Sections ◽  
Α Phase ◽  
Convenient Means ◽  
Van Der Waals Attraction ◽  
Negative Feature ◽  
Film Substrate

The size range of mineral and ceramic particles of one to a few microns is awkward to prepare for examination by TEM. Electrons can be transmitted through smaller particles directly and larger particles can be thinned by crushing and dispersion onto a substrate or by embedding in a film followed by ion milling. Attempts at dispersion onto a thin film substrate often result in particle aggregation by van der Waals attraction. In the present work we studied 1-10 μm diameter Al2O3 spheres which were transformed from the amprphous state to the stable α phase.After the appropriate heat treatment, the spherical powders were embedded in as high a density as practicable in a hard EPON, and then microtomed into thin sections. There are several advantages to this method. Obviously, this is a rapid and convenient means to study the microstructure of serial slices. EDS, ELS, and diffraction studies are also considerably more informative. Furthermore, confidence in sampling reliability is considerably enhanced. The major negative feature is some distortion of the microstructure inherent to the microtoming operation; however, this appears to have been surprisingly small. The details of the method and some typical results follow.

Sign in / Sign up

Export Citation Format

Share Document