In situ monitoring of pulsed laser indium–tin-oxide film deposition by optical emission spectroscopy

2001 ◽  
Vol 56 (6) ◽  
pp. 743-751 ◽  
Author(s):  
C. Calı̀ ◽  
R. Macaluso ◽  
M. Mosca
Symmetry ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 109
Author(s):  
Nicanor Cimpoesu ◽  
Silviu Gurlui ◽  
Georgiana Bulai ◽  
Ramona Cimpoesu ◽  
Viorel-Puiu Paun ◽  
...  

The properties of pulsed laser deposited of Ni60Ti40 shape memory thin films generated in various deposition conditions were investigated. In-situ plasma monitoring was implemented by means of space- and time-resolved optical emission spectroscopy, and ICCD fast camera imaging. Structural and chemical analyses were performed on the thin films using SEM, AFM, EDS, and XRD equipment. The deposition parameters influence on the chemical composition of the thin films was investigated. The peeled layer presented on DSC a solid-state transformation in a different transformation domain compared to the target properties. A fractal model was used to describe the dynamics of laser produced plasma through various non-differentiable functionalities. Through hydrodynamic type regimes, space-time homographic transformations were correlated with the global dynamics of the ablation plasmas. Spatial simultaneity of homographic transformation through a special SL(2R) invariance implies the description of plasma dynamics through Riccati type equations, establishing correlations with the optical emission spectroscopy measurements.


2001 ◽  
Vol 40 (Part 2, No. 4A) ◽  
pp. L313-L315 ◽  
Author(s):  
Harumasa Yoshida ◽  
Tatsuhiro Urushido ◽  
Hideto Miyake ◽  
Kazumasa Hiramatsu

2021 ◽  
Vol 127 (10) ◽  
Author(s):  
S. Irimiciuc ◽  
J. More-Chevalier ◽  
S. Chertpalov ◽  
L. Fekete ◽  
M. Novotný ◽  
...  

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.


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