UV light-induced deposition of low dielectric constant organic polymer for interlayer dielectrics
1998 ◽
Vol 9
(1-4)
◽
pp. 251-254
◽
Keyword(s):
Uv Light
◽
2007 ◽
Vol 50
(6)
◽
pp. 1803
◽
Keyword(s):
Interface formation between metals (Cu, Ti) and low dielectric constant organic polymer (FLARE™ 1.0)
1998 ◽
Vol 16
(1)
◽
pp. 155-162
◽
Keyword(s):
2015 ◽
Vol 33
(4)
◽
pp. 042202
1999 ◽
Vol 38
(Part 1, No. 3A)
◽
pp. 1356-1358
◽
1998 ◽
Vol 37
(Part 1, No. 4A)
◽
pp. 1809-1814
◽
Keyword(s):
2000 ◽
Vol 147
(4)
◽
pp. 1477
◽
Keyword(s):