Polymer-like Organic Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition Using the Para-xylene Precursor as Low Dielectric Constant Interlayer Dielectrics for Multilevel Metallization
1999 ◽
Vol 38
(Part 1, No. 3A)
◽
pp. 1356-1358
◽
2000 ◽
Vol 39
(Part 2, No. 12B)
◽
pp. L1324-L1326
◽
2008 ◽
Vol 53
(1)
◽
pp. 351-356
◽
2005 ◽
Vol 44
(7A)
◽
pp. 4886-4890
◽