Determination of Grain-Boundary Film Thickness by the Fresnel Fringe Imaging Technique

1998 ◽  
Vol 18 (15) ◽  
pp. 2281-2286 ◽  
Author(s):  
Q. Jin ◽  
D.S. Wilkinson ◽  
G.C. Weatherly
2001 ◽  
Vol 89 (7) ◽  
pp. 3971-3975 ◽  
Author(s):  
Z. Erdélyi ◽  
Ch. Girardeaux ◽  
G. A. Langer ◽  
D. L. Beke ◽  
A. Rolland ◽  
...  

2001 ◽  
Vol 671 ◽  
Author(s):  
Michael Gostein ◽  
Paul Lefevre ◽  
Alex A. Maznev ◽  
Michael Joffe

ABSTRACTWe discuss applications of optoacoustic film thickness metrology for characterization of copper chemical-mechanical polishing (CMP). We highlight areas where the use of optoacoustics for CMP characterization provides data complementary to that obtained by other techniques because of its ability to directly measure film thickness with high spatial resolution in a rapid, non-destructive manner. Examples considered include determination of planarization length, measurement of film thickness at intermediate stages of polish, and measurement of arrays of metal lines.


1978 ◽  
Vol 50 (2) ◽  
pp. 703-709 ◽  
Author(s):  
Th. Karakostas ◽  
G. Nouet ◽  
G. L. Bleris ◽  
S. Hagege ◽  
P. Delavignette

2018 ◽  
Vol 64 (246) ◽  
pp. 669-674
Author(s):  
COLIN M. SAYERS

ABSTRACTMeasured elastic stiffnesses of ice polycrystals decrease with increasing temperature due to a decrease in grain boundary stiffness with increasing temperature. In this paper, we represent grain boundaries as imperfectly bonded interfaces, across which traction is continuous, but displacement may be discontinuous. We express the additional compliance due to grain boundaries in terms of a second-rank and a fourth-rank tensor, which quantify the effect on elastic wave velocities of the orientation distribution as well as the normal and shear compliances of the grain boundaries. Measurement of the elastic stiffnesses allows determination of the components of these tensors. Application of the method to resonant ultrasound spectroscopy measurements made on ice polycrystals enables determination of the ratio BN/BS of the normal to shear compliance of the grain boundaries, which are found to be more compliant in shear than in compression. The ratio BN/BS is small at low temperatures, but increases as temperature increases, implying that the normal compliance increases relative to the shear compliance as temperature increases.


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