Characterization and Control of Copper CMP with Optoacoustic Metrology

2001 ◽  
Vol 671 ◽  
Author(s):  
Michael Gostein ◽  
Paul Lefevre ◽  
Alex A. Maznev ◽  
Michael Joffe
Keyword(s):  
Film Thickness ◽  
Spatial Resolution ◽  
Chemical Mechanical Polishing ◽  
High Spatial Resolution ◽  
Mechanical Polishing ◽  
Length Measurement ◽  
And Control ◽  
Non Destructive

ABSTRACTWe discuss applications of optoacoustic film thickness metrology for characterization of copper chemical-mechanical polishing (CMP). We highlight areas where the use of optoacoustics for CMP characterization provides data complementary to that obtained by other techniques because of its ability to directly measure film thickness with high spatial resolution in a rapid, non-destructive manner. Examples considered include determination of planarization length, measurement of film thickness at intermediate stages of polish, and measurement of arrays of metal lines.

Application of EDS Technique for OSP Film Thickness Measurement

2006 ◽  
Author(s):  
Prong Kongsubto ◽  
Sirarat Kongwudthiti
Keyword(s):  
Thin Film ◽  
Quantitative Analysis ◽  
Joint Strength ◽  
Critical Factor ◽  
Thickness Measurement ◽  
Ic Manufacturing ◽  
And Control ◽  
Film Thickness Measurement ◽  
Non Destructive

Abstract Organic solderability preservatives (OSPs) pad is one of the pad finishing technologies where Cu pad is coated with a thin film of an organic material to protect Cu from oxidation during storage and many processes in IC manufacturing. Thickness of OSP film is a critical factor that we have to consider and control in order to achieve desirable joint strength. Until now, no non-destructive technique has been proposed to measure OSP thickness on substrate. This paper reports about the development of EDS technique for estimating OSP thickness, starting with determination of the EDS parameter followed by establishing the correlation between C/Cu ratio and OSP thickness and, finally, evaluating the accuracy of the EDS technique for OSP thickness measurement. EDS quantitative analysis was proved that it can be utilized for OSP thickness estimation.

scholarly journals High spatial resolution photo mosaicking for the monitoring of coralligenous reefs

Coral Reefs ◽  
2021 ◽  
Author(s):  
E. Casoli ◽  
D. Ventura ◽  
G. Mancini ◽  
D. S. Pace ◽  
A. Belluscio ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Low Cost ◽  
Pixel Resolution ◽  
Recording Apparatus ◽  
Assemblage Composition ◽  
Very High Spatial Resolution ◽  
Vertical Walls ◽  
Non Destructive ◽  
Very High

AbstractCoralligenous reefs are characterized by large bathymetric and spatial distribution, as well as heterogeneity; in shallow environments, they develop mainly on vertical and sub-vertical rocky walls. Mainly diver-based techniques are carried out to gain detailed information on such habitats. Here, we propose a non-destructive and multi-purpose photo mosaicking method to study and monitor coralligenous reefs developing on vertical walls. High-pixel resolution images using three different commercial cameras were acquired on a 10 m2 reef, to compare the effectiveness of photomosaic method to the traditional photoquadrats technique in quantifying the coralligenous assemblage. Results showed very high spatial resolution and accuracy among the photomosaic acquired with different cameras and no significant differences with photoquadrats in assessing the assemblage composition. Despite the large difference in costs of each recording apparatus, little differences emerged from the assemblage characterization: through the analysis of the three photomosaics twelve taxa/morphological categories covered 97–99% of the sampled surface. Photo mosaicking represents a low-cost method that minimizes the time spent underwater by divers and capable of providing new opportunities for further studies on shallow coralligenous reefs.

Accurate Determination of Dislocation Density in GaN Using Chemical Mechanical Polishing

2012 ◽  
Vol 2 (1) ◽  
pp. P1-P4 ◽  
Author(s):  
Purushottam Kumar ◽  
Suhas Rao ◽  
Jinhyung Lee ◽  
Deepika Singh ◽  
Rajiv K. Singh
Keyword(s):  
Dislocation Density ◽  
Chemical Mechanical Polishing ◽  
Accurate Determination ◽  
Mechanical Polishing

Determination of the Hydrogen Concentration in Zr-2.5Nb Alloy by a Resonant Ultrasound Spectroscopy

2006 ◽  
Vol 321-323 ◽  
pp. 1576-1579
Author(s):  
Yong Moo Cheong ◽  
Young Suk Kim
Keyword(s):  
Hydrogen Concentration ◽  
Zirconium Alloy ◽  
Nuclear Reactor ◽  
Zirconium Alloys ◽  
Resonant Ultrasound Spectroscopy ◽  
Heavy Water Reactor ◽  
Resonant Ultrasound ◽  
Non Destructive

Zirconium alloys are used for many applications in nuclear components, such as the pressure tube material in a pressurized heavy water reactor, nuclear fuel cladding, etc. One of the problems during the operation of a nuclear reactor is the degradation of the zirconium alloys, which is due to an increase of the hydrogen content in the zirconium alloy. Therefore a non-destructive determination of the hydrogen concentration in zirconium alloy is one of the important issues that need to be addressed. The resonant ultrasound spectroscopy (RUS) technique is evaluated for a characterization of the hydrogen concentration in Zr-2.5Nb alloy. Referring to the terminal solid solubility for dissolution (TSSD) of Zr-2.5Nb alloy, the plot of the mechanical damping coefficient (Q-1) versus the temperature or the deviation of the resonant frequency for the temperature (df/dT) versus the temperature was correlated for the hydrogen concentration in Zr-2.5Nb alloy. It was found that the temperature at an abrupt change of the slope can be correlated with the hydrogen concentration of the Zr-2.5Nb alloy.

Standardisation of X-Ray Powder Diffraction Methods

2004 ◽  
Vol 443-444 ◽  
pp. 31-34
Author(s):  
Giovanni Berti ◽  
Rob Delhez ◽  
S. Norval ◽  
B. Peplinski ◽  
E. Tolle ◽  
...  
Keyword(s):  
Technical Committee ◽  
Non Destructive Testing ◽  
X Ray Diffraction ◽  
Destructive Testing ◽  
X Ray ◽  
Standard Documents ◽  
And Control ◽  
Non Destructive ◽  
Research Centres

This paper outlines the standardisation process for the XRPD method that is currently being considered by a Working Group (WG10) of Technical Committee 138 "Non-destructive Testing" of the European Committee for Standardisation CEN. Several Standard Documents are on the verge of being released. These documents concern the general principles of (X-ray) diffraction, its terminology, and the basic procedures applied. Another document concerns the instruments used and it offers procedures to characterise and control the performance of an X-ray diffractometer properly. It is intended to issue Standard Documents on specific methods, e.g. determination of residual stresses. In fact work is in progress on this subject. The Standard Documents can be used by industry, government organisations, and research centres with activities related to safety, health and the environment, as well as for educational purposes.

Characterization of silicon dioxide film by high spatial resolution cathodoluminescence spectroscopy

2002 ◽  
Vol 92 (12) ◽  
pp. 7153-7156 ◽  
Author(s):  
M. Yoshikawa ◽  
K. Matsuda ◽  
Y. Yamaguchi ◽  
T. Matsunobe ◽  
Y. Nagasawa ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Silicon Dioxide Film ◽  
Cathodoluminescence Spectroscopy ◽  
Dioxide Film
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