Cross-sectional nanoindentation: a new technique for thin film interfacial adhesion characterization

1999 ◽  
Vol 47 (17) ◽  
pp. 4405-4413 ◽  
Author(s):  
J.M. Sánchez ◽  
S. El-Mansy ◽  
B. Sun ◽  
T. Scherban ◽  
N. Fang ◽  
...  
1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.


2016 ◽  
Vol 8 ◽  
pp. 1-7 ◽  
Author(s):  
Ryan J. Kowalski ◽  
C.D. Morrow ◽  
Armando G. McDonald ◽  
Girish M. Ganjyal

2016 ◽  
Vol 4 (35) ◽  
pp. 13555-13562
Author(s):  
Gijs Vanhoutte ◽  
Minxian Wu ◽  
Stijn Schaltin ◽  
Felix Mattelaer ◽  
Christophe Detavernier ◽  
...  

Manganese oxide was electrodeposited from a non-aqueous solution, dimethyl sulfoxide (DMSO), via the reduction of dissolved oxygen.


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