Design of an analytical TEM with integrated imaging ω spectrometer
1991 ◽
Vol 49
◽
pp. 354-355
Keyword(s):
Conventional transmission electron microscopy (CTEM) can be used for high resolution imaging of specimens and for the analysis of minute specimen areas. The capabilities of such an instrument are strongly improved by the integration of an imaging electron energy loss spectrometer. All imaging and diffraction techmques are provided in such an energy filtered transmission electron microscope (EFTEM).In addition to the well-known objective lens for Koehler illumination, the new Zeiss EFTEM features a projective lens system which integrates a new imaging ω-spectrometer comprising four individual magnets and one hexapole corrector Fig.l and Fig. 3 show the design of this microscope.
1996 ◽
Vol 11
(11)
◽
pp. 2777-2784
◽
2008 ◽
Vol 126
◽
pp. 012094
◽