The Detection of Transmitted Energy Loss Electrons for Elemental Analysis
1975 ◽
Vol 33
◽
pp. 236-237
Keyword(s):
X Ray
◽
Elemental analysis by means of energy loss electrons transmitted through thin specimens has the potential of being a very useful technique for the microanalysis of light elements (e.g. 1-5). The advantages of the energy loss technique over x-ray detection have been discussed in detail in ref. 1. They are basically, the lack of dependence of the detection efficiency on the fluorescent yield (which decreases rapidly with decreasing Z) and the possibility of increased collection efficiency of the energy loss electrons (which are concentrated at relatively small angles with respect to the incident beam direction).