Low-workfunction field-emission source for high-resolution EELS

Author(s):  
P. E. Batson

In recent years,instrumentation for electron energy loss spectroscopy (EELS) has been steadily improved to increase energy resolution and collection efficiency. At present 0.40eV at 10mR collection half angle is available with commercial magnetic sectors (e.g. Gatan, Inc. and VG Microscopes, Ltd.), and 70meV at 10mR has been demonstrated by use of a Wien filter within a large deceleration field. When these high resolution spectrometers are coupled to the modern small electron probe instrument, we obtain a tool which promises to reveal local changes in bandstructure and bonding near defects and interfaces in heterogeneous materials.Unfortunately, typical electron sources have intrinsic energy widths which limit attainable spectroscopic resolution in the absence of some monochromation system. For instance, the W thermal emitter has a half width of about 1eV.

Author(s):  
Michiyoshi Tanaka ◽  
Masami Terauchi ◽  
Ryuichi Kuzuo ◽  
Katsushige Tsuno ◽  
Junichi Ohyama ◽  
...  

Boersch, Geiger and coworkers constructed high resolution electron energy-loss spectroscopy (EELS) instruments. These had a very high energy resolution of approximately 3meV, but were operated at a relatively low accelerating voltage of about 30kV and could only obtain spectra from specimen areas greater than about 10µm in diameter.We have been developing a new EELS instrument to investigate detailed electronic structures and thermal vibrations by taking spectra from specified small specimen areas and specified small reciprocal space areas. Our EELS microscope is composed of a thermal-type field emission gun, a Wien-filter monochrometer, the basic part of a JEM-1200EX microscope, a Wien-filter analyzer and a CCD detection system (Fig.1). Figure 2 schematically shows an xy-section of the Wien filter. The filter was designed to produce the Wien condition E=vxB (E:electric field, B:magnetic field, v:velocity of electrons) not only in the filter but also in the fringing field regions and to produce the stigmatic focus. The length of the filter was chosen to be 4cm.


Author(s):  
N. D. Browning ◽  
M. M. McGibbon ◽  
M. F. Chisholm ◽  
S. J. Pennycook

The recent development of the Z-contrast imaging technique for the VG HB501 UX dedicated STEM, has added a high-resolution imaging facility to a microscope used mainly for microanalysis. This imaging technique not only provides a high-resolution reference image, but as it can be performed simultaneously with electron energy loss spectroscopy (EELS), can be used to position the electron probe at the atomic scale. The spatial resolution of both the image and the energy loss spectrum can be identical, and in principle limited only by the 2.2 Å probe size of the microscope. There now exists, therefore, the possibility to perform chemical analysis of materials on the scale of single atomic columns or planes.In order to achieve atomic resolution energy loss spectroscopy, the range over which a fast electron can cause a particular excitation event, must be less than the interatomic spacing. This range is described classically by the impact parameter, b, which ranges from ~10 Å for the low loss region of the spectrum to <1Å for the core losses.


Author(s):  
Zhifeng Shao ◽  
Ruoya Ho ◽  
Andrew P. Somlyo

Electron energy loss spectroscopy (EELS) has been a powerful tool for high resolution studies of elemental distribution, as well as electronic structure, in thin samples. Its foundation for biological research has been laid out nearly two decades ago, and in the subsequent years it has been subjected to rigorous, but by no means extensive research. In particular, some problems unique to EELS of biological samples, have not been fully resolved. In this article we present a brief summary of recent methodological developments, related to biological applications of EELS, in our laboratory. The main purpose of this work was to maximize the signal to noise ratio (S/N) for trace elemental analysis at a minimum dose, in order to reduce the electron dose and/or time required for the acquisition of high resolution elemental maps of radiation sensitive biological materials.Based on the simple assumption of Poisson distribution of independently scattered electrons, it had been generally assumed that the optimum specimen thickness, at which the S/N is a maximum, must be the total inelastic mean free path of the beam electron in the sample.


Sign in / Sign up

Export Citation Format

Share Document