Probe size and 5th-order aberration

1987 ◽  
Vol 45 ◽  
pp. 134-135 ◽  
Author(s):  
Zhifeng Shao
Keyword(s):  
Electron Probe ◽  
Spherical Aberration ◽  
Wave Length ◽  
Cylindrical Symmetry ◽  
Electron Wave ◽  
Third Order ◽  
The Third ◽  
Probe Radius ◽  
Small Probe ◽  
Probe Size

A small electron probe has many applications in many fields and in the case of the STEM, the probe size essentially determines the ultimate resolution. However, there are many difficulties in obtaining a very small probe.Spherical aberration is one of them and all existing probe forming systems have non-zero spherical aberration. The ultimate probe radius is given byδ = 0.43Csl/4ƛ3/4where ƛ is the electron wave length and it is apparent that δ decreases only slowly with decreasing Cs. Scherzer pointed out that the third order aberration coefficient always has the same sign regardless of the field distribution, provided only that the fields have cylindrical symmetry, are independent of time and no space charge is present. To overcome this problem, he proposed a corrector consisting of octupoles and quadrupoles.

Improvements in the electron probe forming capabilities and x-ray hole counts in the Philips TEM

1983 ◽  
Vol 41 ◽  
pp. 376-377
Author(s):  
Richard L. McConville
Keyword(s):  
Field Strength ◽  
Electron Probe ◽  
Spherical Aberration ◽  
Focal Length ◽  
Objective Lens ◽  
Parallel Beam ◽  
Tilt Axis ◽  
X Ray ◽  
Small Probe ◽  
Specimen Height

A second generation twin lens has been developed. This symmetrical lens with a wider bore, yet superior values of chromatic and spherical aberration for a given focal length, retains both eucentric ± 60° tilt movement and 20°x ray detector take-off angle at 90° to the tilt axis. Adjust able tilt axis height, as well as specimen height, now ensures almost invariant objective lens strengths for both TEM (parallel beam conditions) and STEM or nano probe (focused small probe) modes.These modes are selected through use of an auxiliary lens situ ated above the objective. When this lens is on the specimen is illuminated with a parallel beam of electrons, and when it is off the specimen is illuminated with a focused probe of dimensions governed by the excitation of the condenser 1 lens. Thus TEM/STEM operation is controlled by a lens which is independent of the objective lens field strength.

New Feasible Concepts of Aberration Correction for Realizing High-Resolution Electron Microscopes

1990 ◽  
Vol 48 (1) ◽  
pp. 202-203
Author(s):  
H. Rose
Keyword(s):  
Spherical Aberration ◽  
Wave Length ◽  
Electron Wave ◽  
Optical Lens ◽  
Resolution Electron ◽  
Rotationally Symmetric ◽  
Electron Microscopes ◽  
The Cost ◽  
Imaging Performance ◽  
Acceleration Voltage

The imaging performance of the light optical lens systems has reached such a degree of perfection that nowadays numerical apertures of about 1 can be utilized. Compared to this state of development the objective lenses of electron microscopes are rather poor allowing at most usable apertures somewhat smaller than 10-2 . This severe shortcoming is due to the unavoidable axial chromatic and spherical aberration of rotationally symmetric electron lenses employed so far in all electron microscopes.The resolution of such electron microscopes can only be improved by increasing the accelerating voltage which shortens the electron wave length. Unfortunately, this procedure is rather ineffective because the achievable gain in resolution is only proportional to λ1/4 for a fixed magnetic field strength determined by the magnetic saturation of the pole pieces. Moreover, increasing the acceleration voltage results in deleterious knock-on processes and in extreme difficulties to stabilize the high voltage. Last not least the cost increase exponentially with voltage.

Aberrations

2019 ◽  
pp. 215-248
Author(s):  
B. D. Guenther
Keyword(s):  
Hubble Space Telescope ◽  
Spherical Aberration ◽  
Chromatic Aberration ◽  
Optical Path Difference ◽  
Path Difference ◽  
Optical Path ◽  
Wavefront Aberration ◽  
Third Order ◽  
The Third ◽  
Field Curvature

Using simple ray tracinig technliques presented in Chapter 6, we demonstrate that a general ray is not focused to the position predicted by paraxial theory. The aberration displayed is spherical aberration. Two methods of measuring aberration: the use of optical path difference to characterize wavefront aberration. The transverse ray coefficients to generate a ray intercept plot. Experimental examples of all the third order aberrations are given. In addition to spherical aberration, they include coma, astigmatism, field curvature, and distortion Only two types of aberration correction are discussed, removal of spherical aberration in the Hubble Space telescope and chromatic aberration. A detailed example of chromatic aberration is given.

scholarly journals CALCULATION OF THE HIGHER-ORDER AXIAL SPHERICAL ABERRATIONS OF A HIGH-APERTURE FOCUSING HOLOGRAPHIC OPTICAL ELEMENT WITH THE CORRECTED THIRD-ORDER SPHERICAL ABERRATION

2018 ◽  
Vol 42 (1) ◽  
pp. 44-53
Author(s):  
Yu. Ts. Batomunkuev ◽  
A. A. Dianova
Keyword(s):  
Spherical Aberration ◽  
Visible Spectrum ◽  
Optical Element ◽  
Higher Order ◽  
Point Sources ◽  
Third Order ◽  
The Third ◽  
Holographic Optical Element ◽  
Seventh Order ◽  
Spectral Ranges

Results of calculating the radius of higher-order spherical aberrations (fifth, seventh and ninth orders) of a high-aperture focusing holographic optical element (HOE) with corrected third-order spherical aberration in the operating spectral range are discussed. As examples, high-aperture axial HOEs with relative apertures close to 1:1 in specified spectral ranges are considered. Coordinates of the point sources of a divergent reference wave and a convergent object wave of the HOE are given. It is shown that when imaging a point source emitting in the 0.250-0.281-µm and 0.500- 0.563-µm spectral ranges, the use of an HOE in the first and second diffraction orders makes it is possible to correct the third-order spherical aberration on two wavelengths and the fifth- and seventh-order spherical aberrations on one wavelength. Note that these visible-spectrum wavelengths are different from the HOE's recording wavelength of 0.532 µm.

Toward High-Resolution Low-Voltage SEM

1988 ◽  
Vol 46 ◽  
pp. 218-219
Author(s):  
Zhifeng Shao
Keyword(s):  
Low Voltage ◽  
Spherical Aberration ◽  
Chromatic Aberration ◽  
Limiting Factor ◽  
Operating Voltage ◽  
Probe Radius ◽  
Non Local ◽  
Electron Microscopes ◽  
Image Position ◽  
Scanning Electron Microscopes

Recently, low voltage (≤5kV) scanning electron microscopes have become popular because of their unprecedented advantages, such as minimized charging effects and smaller specimen damage, etc. Perhaps the most important advantage of LVSEM is that they may be able to provide ultrahigh resolution since the interaction volume decreases when electron energy is reduced. It is obvious that no matter how low the operating voltage is, the resolution is always poorer than the probe radius. To achieve 10Å resolution at 5kV (including non-local effects), we would require a probe radius of 5∽6 Å. At low voltages, we can no longer ignore the effects of chromatic aberration because of the increased ratio δV/V. The 3rd order spherical aberration is another major limiting factor. The optimized aperture should be calculated as

High spatial resolution x-ray microanalysis of interfaces

1995 ◽  
Vol 53 ◽  
pp. 284-285
Author(s):  
J. R. Michael
Keyword(s):  
Spatial Resolution ◽  
Electron Probe ◽  
Solid Angle ◽  
Collection Efficiency ◽  
Spatial Scales ◽  
Energy Dispersive Spectrometer ◽  
X Rays ◽  
X Ray ◽  
Probe Size ◽  
Brightness Field

X-ray microanalysis in the analytical electron microscope (AEM) refers to a technique by which chemical composition can be determined on spatial scales of less than 10 nm. There are many factors that influence the quality of x-ray microanalysis. The minimum probe size with sufficient current for microanalysis that can be generated determines the ultimate spatial resolution of each individual microanalysis. However, it is also necessary to collect efficiently the x-rays generated. Modern high brightness field emission gun equipped AEMs can now generate probes that are less than 1 nm in diameter with high probe currents. Improving the x-ray collection solid angle of the solid state energy dispersive spectrometer (EDS) results in more efficient collection of x-ray generated by the interaction of the electron probe with the specimen, thus reducing the minimum detectability limit. The combination of decreased interaction volume due to smaller electron probe size and the increased collection efficiency due to larger solid angle of x-ray collection should enhance our ability to study interfacial segregation.

Chromatic aberration and low-voltage SEM

1987 ◽  
Vol 45 ◽  
pp. 546-547
Author(s):  
Zhifeng Shao ◽  
A.V. Crewe
Keyword(s):  
Electron Energy ◽  
Low Voltage ◽  
Spherical Aberration ◽  
Chromatic Aberration ◽  
Primary Electron ◽  
Probe Size ◽  
Non Local ◽  
Optical Treatment ◽  
Electron Microscopes ◽  
Scanning Electron Microscopes

For scanning electron microscopes, it is plausible that by lowering the primary electron energy, one can decrease the volume of interaction and improve resolution. As shown by Crewe /1/, at V0 =5kV a 10Å resolution (including non-local effects) is possible. To achieve this, we would need a probe size about 5Å. However, at low voltages, the chromatic aberration becomes the major concern even for field emission sources. In this case, δV/V = 0.1 V/5kV = 2x10-5. As a rough estimate, it has been shown that /2/ the chromatic aberration δC should be less than ⅓ of δ0 the probe size determined by diffraction and spherical aberration in order to neglect its effect. But this did not take into account the distribution of electron energy. We will show that by using a wave optical treatment, the tolerance on the chromatic aberration is much larger than we expected.

Children’s Recall of Approximations to English

1973 ◽  
Vol 16 (2) ◽  
pp. 201-212 ◽  
Author(s):  
Elizabeth Carrow ◽  
Michael Mauldin
Keyword(s):  
Language Development ◽  
Fourth Order ◽  
Third Order ◽  
Memory Processes ◽  
The Third ◽  
General Index ◽  
General Linguistic

As a general index of language development, the recall of first through fourth order approximations to English was examined in four, five, six, and seven year olds and adults. Data suggested that recall improved with age, and increases in approximation to English were accompanied by increases in recall for six and seven year olds and adults. Recall improved for four and five year olds through the third order but declined at the fourth. The latter finding was attributed to deficits in semantic structures and memory processes in four and five year olds. The former finding was interpreted as an index of the development of general linguistic processes.

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