Double-tilting specimen holder cooled by liquid helium for JEM-4000EX
For the study of phase transformation and structure change of crystals at low temperature in atomic scale, flowing liquid He specimen cooling holder has been constructed. It was aimed to achieve the low temperature without giving any effects to the resolution and analytical function of JEM-4000EX such as X-ray detection system and goniometer functions. The pole piece of electron lens used in this experiment has the following functions, i.e. Cs=2.88mm Cc=2.69mm f=3.55mm and the resolution is 0.34nm. The present specimen stage can be tilted ±20 degrees to X- and Y-directions inside of this pole piece. In connection of double tilt mechanism and protection of heat loss, double layered bellows are fabricated at the entrance of driving mechanism. At this point every vibrations from outside of the microscope such as from pumping out system of introduced liquid helium (the pipe A in Fig. 1) would be extinguished. This mechanism is fabricated in the vacuum box (marked by B in Fig.1).