Short-range order in amorphous co-sputtered Ta-Al thin films

Author(s):  
J.C. Barry ◽  
R.S. Timsit ◽  
D. Landheer

Tantalum-aluminium thin films have assumed considerable technological importance since the discovery in the late 1960's that the films are useful in the fabrication of thin film resistors and capacitors. It is generally claimed that these films, when prepared by co-sputtering Ta and Al, are amorphous over a range of Ta concentrations extending approximately from 15 to 75 at%, and are crystalline beyond this range. Diffuse electron diffraction patterns and ‘mottle pattern’ transmission electron micrographs are typical characteristics of the amorphous phase. In this present study we have attempted to identify any atomic short range order in the amorphous Ta-Al films and to follow the changes in this order as the Ta concentration increases across the amorphous/crystalline transition. The co-sputtered Ta-Al films of ≈100A thickness were examined in a high resolution 4000EX electron microscope (top entry, ±15°(x,y) tilt, Cs = 1.0mm ) at 400kV.

1998 ◽  
Vol 520 ◽  
Author(s):  
Wentao Qin ◽  
W. Shih ◽  
J. Lib ◽  
W. James ◽  
H. Siriwardaneane ◽  
...  

ABSTRACTElectron diffraction patterns and high-resolution transmission electron microscope (HREM) images show that the dominant phase in tungsten carbide thin films grown by plasma enhanced chemical vapor deposition is WC(1−x). The f.c.c crystal structure and the unit cell size of WC(1−x) have been determined via electron powder diffraction. The two largest and most dominant spacings in HREM images are the {111} and {002} spacings of WC(1−x). Cross lattice fringes along the two most densely populated zones of WC(1−x) are seen. The sizes and aspect ratios of nano-crystals have been measured from HREM images. Stereo analysis of individual nano-crystals has been done. Confirmation of the 3-D structure of WC(1−x) via spacings larger than 0.15 nm will require a tilt larger than 35° between images.


1999 ◽  
Vol 580 ◽  
Author(s):  
L. Q. Xing ◽  
Xiaofeng Gu ◽  
T. A. Lusby ◽  
A. J. Melmed ◽  
T. C. Hufnagel

AbstractWe have examined the effect of Ti content on the crystallization kinetics of Zr-based amorphous alloys. In Zr59Ti3Cu20Ni8Al10, annealing above the glass transition temperature produces 50-100 nm crystalline precipitates, as seen in transmission electron microscope images. In contrast, TEM images and diffraction patterns from annealed Zr54.5Ti7.5Cu20Ni8Al10 show no evidence of crystalline phase formation. Structural changes upon annealing do occur in this alloy, however, as revealed by field ion microscopy. The effect of Ti is to favor the formation of clusters of short-range order; this tendency for clustering is apparently the cause of difference in crystallization behavior between the two alloys.


Author(s):  
E.A. Kenik ◽  
T.A. Zagula ◽  
M.K. Miller ◽  
J. Bentley

The state of long-range order (LRO) and short-range order (SRO) in Ni4Mo has been a topic of interest for a considerable time (see Brooks et al.). The SRO is often referred to as 1½0 order from the apparent position of the diffuse maxima in diffraction patterns, which differs from the positions of the LRO (D1a) structure. Various studies have shown that a fully disordered state cannot be retained by quenching, as the atomic arrangements responsible for the 1½0 maxima are present at temperatures above the critical ordering temperature for LRO. Over 20 studies have attempted to identify the atomic arrangements associated with this state of order. A variety of models have been proposed, but no consensus has been reached. It has also been shown that 1 MeV electron irradiation at low temperatures (∼100 K) can produce the disordered phase in Ni4Mo. Transmission electron microscopy (TEM), atom probe field ion microscopy (APFIM), and electron irradiation disordering have been applied in the current study to further the understanding of the ordering processes in Ni4Mo.


1997 ◽  
Vol 103 (1) ◽  
pp. 5-12 ◽  
Author(s):  
M. Wojcik ◽  
J.P. Jay ◽  
P. Panissod ◽  
E. Jedryka ◽  
J. Dekoster ◽  
...  

1978 ◽  
Vol 34 (6) ◽  
pp. 1025-1027 ◽  
Author(s):  
M. Gasgnier ◽  
P. Caro

Kaul & Saxena [Acta Cryst. (1977), A33, 992-996] have reported the existence of long-range and short-range order in a non-stoichiometric phase 'LnO x ' (Ln = rare earth). It is shown that the experiments they are describing are indeed the oxidation of the rare-earth hydride LnH2 into the rare-earth cubic C-type sesquioxide. The interpretation they give of their experiments is to be discarded entirely.


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