Spatial resolution measurements of electron backscatter diffraction patterns (EBSPs) in the scanning electron microscope

Author(s):  
Jarle Hjelen ◽  
Erik Nes

In the EBSP method the stationary electron beam hits a highly tilted bulk specimen in the SEM. The backscattered Bragg diffracted electrons form the Kikuchi line pattern on a phosphor screen. Since the first EBSP experiments were carried out in 1973, this technique has been further developed to determine crystal orientations in connection with texture development in aluminium. Using the EBSP method to calculate local lattice curvatures in heavily deformed aluminium, the spatial resolution has to be better than the selected area channeling pattern (SACP) method.The EBSP resolution (d) was measured by moving the electron beam digitally across grain boundaries in an aluminium sample. The resolution was defined to be the overlapping distance between two diffraction patterns.

1997 ◽  
Vol 3 (S2) ◽  
pp. 879-880
Author(s):  
J. R. Michael ◽  
M. E. Schlienger ◽  
R. P. Goehner

The technique of electron backscatter diffraction (EBSD) in the scanning electron microscope is currently finding a large number of important applications in materials science. The patterns formed through EBSD were first studied over 40 years ago. It has only been in the last 10 years that the technique has really begun to have an impact on the study of materials. The introduction of automatic pattern indexing software has enabled the technique to be used for mapping the orientation of a polycrystalline sample. The more exciting and universally interesting application of the technique has been the identification of micron and sub-micron sized crystalline phases based on their chemistry and crystallography determined by EBSD.EBSD is obtained by illuminating a highly tilted sample (>45° from horizontal) with a stationary electron beam. Electrons backscattered from the sample may satisfy the condition for channeling and will produce images that contain bands of increased and decreased intensity that are equivalent to electron channeling patterns.


1999 ◽  
Vol 589 ◽  
Author(s):  
J. R. Michael ◽  
R. P. Goehner

AbstractEBSD in the SEM has been developed into a tool that can provide identification of unknown crystalline phases with a spatial resolution that is better than one micrometer. This technique has been applied to a wide range of materials. Use of the HOLZ rings in the EBSD patterns has enabled the reduced unit cell to be determined from unindexed EBSD patterns. This paper introduces EBSD for phase identification and illustrates the technique with examples from metal joining and particle analysis. Reduced unit cell determination from EBSD patterns is then discussed.


Author(s):  
H. Weiland ◽  
D. P. Field

Recent advances in the automatic indexing of backscatter Kikuchi diffraction patterns on the scanning electron microscope (SEM) has resulted in the development of a new type of microscopy. The ability to obtain statistically relevant information on the spatial distribution of crystallite orientations is giving rise to new insight into polycrystalline microstructures and their relation to materials properties. A limitation of the technique in the SEM is that the spatial resolution of the measurement is restricted by the relatively large size of the electron beam in relation to various microstructural features. Typically the spatial resolution in the SEM is limited to about half a micron or greater. Heavily worked structures exhibit microstructural features much finer than this and require resolution on the order of nanometers for accurate characterization. Transmission electron microscope (TEM) techniques offer sufficient resolution to investigate heavily worked crystalline materials.Crystal lattice orientation determination from Kikuchi diffraction patterns in the TEM (Figure 1) requires knowledge of the relative positions of at least three non-parallel Kikuchi line pairs in relation to the crystallite and the electron beam.


2020 ◽  
Vol 26 (3) ◽  
pp. 447-457 ◽  
Author(s):  
Kevin Kaufmann ◽  
Chaoyi Zhu ◽  
Alexander S. Rosengarten ◽  
Kenneth S. Vecchio

AbstractElectron backscatter diffraction (EBSD) is one of the primary tools in materials development and analysis. The technique can perform simultaneous analyses at multiple length scales, providing local sub-micron information mapped globally to centimeter scale. Recently, a series of technological revolutions simultaneously increased diffraction pattern quality and collection rate. After collection, current EBSD pattern indexing techniques (whether Hough-based or dictionary pattern matching based) are capable of reliably differentiating between a “user selected” set of phases, if those phases contain sufficiently different crystal structures. EBSD is currently less well suited for the problem of phase identification where the phases in the sample are unknown. A pattern analysis technique capable of phase identification, utilizing the information-rich diffraction patterns potentially coupled with other data, such as EDS-derived chemistry, would enable EBSD to become a high-throughput technique replacing many slower (X-ray diffraction) or more expensive (neutron diffraction) methods. We utilize a machine learning technique to develop a general methodology for the space group classification of diffraction patterns; this is demonstrated within the $\lpar 4/m\comma \;\bar{3}\comma \;\;2/m\rpar$ point group. We evaluate the machine learning algorithm's performance in real-world situations using materials outside the training set, simultaneously elucidating the role of atomic scattering factors, orientation, and pattern quality on classification accuracy.


2021 ◽  
Vol 54 (2) ◽  
pp. 513-522
Author(s):  
Edward L. Pang ◽  
Christopher A. Schuh

Accurately indexing pseudosymmetric materials has long proven challenging for electron backscatter diffraction. The recent emergence of intensity-based indexing approaches promises an enhanced ability to resolve pseudosymmetry compared with traditional Hough-based indexing approaches. However, little work has been done to understand the effects of sample position and orientation on the ability to resolve pseudosymmetry, especially for intensity-based indexing approaches. Thus, in this work the effects of crystal orientation and detector distance in a model tetragonal ZrO2 (c/a = 1.0185) material are quantitatively investigated. The orientations that are easiest and most difficult to correctly index are identified, the effect of detector distance on indexing confidence is characterized, and these trends are analyzed on the basis of the appearance of specific zone axes in the diffraction patterns. The findings also point to the clear benefit of shorter detector distances for resolving pseudosymmetry using intensity-based indexing approaches.


2020 ◽  
Vol 53 (4) ◽  
pp. 896-903
Author(s):  
Flávia Braga de Oliveira ◽  
Gilberto Álvares da Silva ◽  
Leonardo Martins Graça

Magnetite and hematite iron oxides are minerals of great economic and scientific importance. The oxidation of magnetite to hematite is characterized as a topotaxial reaction in which the crystallographic orientations of the hematite crystals are determined by the orientation of the magnetite crystals. Thus, the transformation between these minerals is described by specific orientation relationships, called topotaxial relationships. This study presents electron-backscatter diffraction analyses conducted on natural octahedral crystals of magnetite partially transformed into hematite. Inverse pole figure maps and pole figures were used to establish the topotaxial relationships between these phases. Transformation matrices were also applied to Euler angles to assess the diffraction patterns obtained and confirm the identified relationships. A new orientation condition resulting from the magnetite–hematite transformation was characterized, defined by the parallelism between the octahedral planes {111} of magnetite and rhombohedral planes \{10\bar {1}1\} of hematite. Moreover, there was a coincidence between one of the octahedral planes of magnetite and the basal {0001} plane of hematite, and between dodecahedral planes {110} of magnetite and prismatic planes \{11\bar {2}0\} of hematite. All these three orientation conditions are necessary and define a growth model for hematite crystals from a magnetite crystal. A new topotaxial relationship is also proposed: (111)Mag || (0001)Hem and (\bar {1}\bar {1}1)_{\rm Mag} || (10\bar {1}1)_{\rm Hem}.


2015 ◽  
Vol 48 (3) ◽  
pp. 797-813 ◽  
Author(s):  
Farangis Ram ◽  
Stefan Zaefferer ◽  
Tom Jäpel ◽  
Dierk Raabe

The fidelity – that is, the error, precision and accuracy – of the crystallographic orientations and disorientations obtained by the classical two-dimensional Hough-transform-based analysis of electron backscatter diffraction patterns (EBSPs) is studied. Using EBSPs simulated based on the dynamical electron diffraction theory, the fidelity analysis that has been previously performed using the patterns simulated based on the theory of kinematic electron diffraction is improved. Using the same patterns, the efficacy of a Fisher-distribution-based analytical accuracy measure for orientation and disorientation is verified.


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