scholarly journals X-ray imaging of silicon die within fully packaged semiconductor devices

2021 ◽  
pp. 1-7
Author(s):  
Brian K. Tanner ◽  
Patrick J. McNally ◽  
Andreas N. Danilewsky
Keyword(s):  
Synchrotron Radiation ◽  
Feasibility Studies ◽  
Monochromatic Radiation ◽  
X Ray Diffraction ◽  
Divergent Beam ◽  
X Ray ◽  
X Ray Imaging ◽  
Setting Process ◽  
Diffraction Imaging ◽  
Lattice Planes

X-ray diffraction imaging (XRDI) (topography) measurements of silicon die warpage within fully packaged commercial quad-flat no-lead devices are described. Using synchrotron radiation, it has been shown that the tilt of the lattice planes in the Analog Devices AD9253 die initially falls, but after 100 °C, it rises again. The twist across the die wafer falls linearly with an increase in temperature. At 200 °C, the tilt varies approximately linearly with position, that is, displacement varies quadratically along the die. The warpage is approximately reversible on cooling, suggesting that it has a simple paraboloidal form prior to encapsulation; the complex tilt and twisting result from the polymer setting process. Feasibility studies are reported, which demonstrate that a divergent beam and quasi-monochromatic radiation from a sealed X-ray tube can be used to perform warpage measurements by XRDI in the laboratory. Existing tools have limitations because of the geometry of the X-ray optics, resulting in applicability only to simple warpage structures. The necessary modifications required for use in situations of complex warpage, for example, in multiple die interconnected packages are specified.

scholarly journals Simultaneous Multi-Bragg Peak Coherent X-ray Diffraction Imaging

Crystals ◽  
2021 ◽  
Vol 11 (3) ◽  
pp. 312
Author(s):  
Florian Lauraux ◽  
Stéphane Labat ◽  
Sarah Yehya ◽  
Marie-Ingrid Richard ◽  
Steven J. Leake ◽  
...  
Keyword(s):  
Bragg Reflection ◽  
Volume Ratio ◽  
X Ray Diffraction ◽  
X Ray ◽  
Crystal Substrate ◽  
In Series ◽  
Diffraction Imaging ◽  
Diffraction Patterns ◽  
Lattice Planes ◽  
Oriented Parallel

The simultaneous measurement of two Bragg reflections by Bragg coherent X-ray diffraction is demonstrated on a twinned Au crystal, which was prepared by the solid-state dewetting of a 30 nm thin gold film on a sapphire substrate. The crystal was oriented on a goniometer so that two lattice planes fulfill the Bragg condition at the same time. The Au 111 and Au 200 Bragg peaks were measured simultaneously by scanning the energy of the incident X-ray beam and recording the diffraction patterns with two two-dimensional detectors. While the former Bragg reflection is not sensitive to the twin boundary, which is oriented parallel to the crystal–substrate interface, the latter reflection is only sensitive to one part of the crystal. The volume ratio between the two parts of the twinned crystal is about 1:9, which is also confirmed by Laue microdiffraction of the same crystal. The parallel measurement of multiple Bragg reflections is essential for future in situ and operando studies, which are so far limited to either a single Bragg reflection or several in series, to facilitate the precise monitoring of both the strain field and defects during the application of external stimuli.

Effect of finite spatial coherence length on small-angle scattering

2015 ◽  
Vol 48 (6) ◽  
pp. 1660-1664 ◽  
Author(s):  
Yuya Shinohara ◽  
Yoshiyuki Amemiya
Keyword(s):  
Small Angle ◽  
Coherence Length ◽  
Spatial Coherence ◽  
Small Angle Scattering ◽  
Forward Scattering ◽  
X Ray Diffraction ◽  
X Ray ◽  
X Ray Imaging ◽  
Angle Scattering ◽  
Diffraction Imaging

This study shows that forward scattering at the origin of reciprocal space contributes to the scattering intensity profiles of ultra-small-angle scattering. The forward scattering corresponds to a Fourier transform of the X-ray coherent volume on a sample. This contribution is usually ignored in the study of small-angle scattering, while it is fully considered in the fields of X-ray imaging, such as coherent X-ray diffraction imaging and X-ray ptychography. This effect is explicitly illustrated in the context of small-angle scattering, and the effect of a finite spatial coherence length on small-angle scattering is discussed.

Two- and Three-Beam X-ray Diffraction Imaging of Domains in Magnetite

1998 ◽  
Vol 31 (5) ◽  
pp. 726-732
Author(s):  
C. Medrano ◽  
F. Heyroth ◽  
M. Schlenker ◽  
J. Baruchel ◽  
J. Espeso
Keyword(s):  
Synchrotron Radiation ◽  
Room Temperature ◽  
X Ray Diffraction ◽  
Large Crystal ◽  
Angular Sensitivity ◽  
X Ray ◽  
Diffraction Imaging ◽  
The Difference ◽  
Topographic Imaging ◽  
Radiation Beams

The X-ray diffraction topographic imaging process for ferrimagnetic domains in magnetite Fe3O4at room temperature is investigated, in two- and three-beam cases, for incident synchrotron radiation beams differing in angular divergence and energy spread. In the usual two-beam configuration, domain or wall contrast is obtained from the difference in Bragg conditions, or from the slight difference in the direction of the beams diffracted by neighbouring domains, revealed by the large crystal-to-film distance that can be used at a third-generation synchrotron radiation facility. A three-beamUmweganregungcase involving the weak 171 and the strong 131 reflections shows unusual domain contrast on the 171 topographs, even on images involving energy or angle integration; this contrast is particularly evident on white-beam topographs. The high angular sensitivity this implies is associated with the difference in dispersion relation between the two reflections.

Recent progress in synchrotron radiation 3D–4D nano-imaging based on X-ray full-field microscopy

Microscopy ◽  
2020 ◽  
Vol 69 (5) ◽  
pp. 259-279
Author(s):  
Akihisa Takeuchi ◽  
Yoshio Suzuki
Keyword(s):  
Synchrotron Radiation ◽  
Fresnel Zone ◽  
Imaging Techniques ◽  
Effective Field ◽  
Current Status ◽  
Full Field ◽  
X Ray ◽  
X Ray Imaging ◽  
Diffraction Imaging ◽  
Nano Imaging

Abstract The advent of high-flux, high-brilliance synchrotron radiation (SR) has prompted the development of high-resolution X-ray imaging techniques such as full-field microscopy, holography, coherent diffraction imaging and ptychography. These techniques have strong potential to establish non-destructive three- and four-dimensional nano-imaging when combined with computed tomography (CT), called nano-tomography (nano-CT). X-ray nano-CTs based on full-field microscopy are now routinely available and widely used. Here we discuss the current status and some applications of nano-CT using a Fresnel zone plate as an objective. Optical properties of full-field microscopy, such as spatial resolution and off-axis aberration, which determine the effective field of view, are also discussed, especially in relation to 3D tomographic imaging.

Design of the experimental stage for coherent diffraction imaging

2010 ◽  
Vol 1 (SRMS-7) ◽  
Author(s):  
Z. D. Pešić ◽  
U. H. Wagner ◽  
C. Rau
Keyword(s):  
Preliminary Design ◽  
X Ray Diffraction ◽  
Contrast Imaging ◽  
Coherent Imaging ◽  
Full Field ◽  
X Ray ◽  
Coherent Diffraction Imaging ◽  
X Ray Imaging ◽  
Diffraction Imaging ◽  
Experimental Stage

The I13 beamline of Diamond Light Source encompasses two fully independent branches devoted for coherent imaging experiments (coherent X-ray diffraction and ptychography) and X-ray imaging and tomography (full-field microscopy and in-line phase contrast imaging). This contributed paper outlines the main features of the coherence beamline and a preliminary design of the experimental station for coherent X-ray diffraction imaging.

Observation of divergent-beam X-ray diffraction from a crystal of diamond using synchrotron radiation

2004 ◽  
Vol 11 (2) ◽  
pp. 187-189 ◽  
Author(s):  
A. M. Glazer ◽  
S. P. Collins ◽  
D. Zekria ◽  
J. Liu ◽  
M. Golshan
Keyword(s):  
Synchrotron Radiation ◽  
X Ray Diffraction ◽  
Divergent Beam ◽  
X Ray

Development of a novel apparatus for experiments in soft X-ray diffraction imaging and diffraction tomography

2003 ◽  
Vol 104 ◽  
pp. 27-30 ◽  
Author(s):  
T. Beetz ◽  
C. Jacobsen ◽  
C.-C. Kao ◽  
J. Kirz ◽  
O. Mentes ◽  
...  
Keyword(s):  
Diffraction Tomography ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Imaging

scholarly journals Current status of the studies of x-ray diffraction on tungsten during pulsed heat loads at the scattering station «plasma» at the VEPP-4 source of synchrotron radiation

2020 ◽  
Author(s):  
Sergey Kazantsev ◽  
Aleksey Arakcheev ◽  
Oleg Evdokov ◽  
Lev Shekhtman ◽  
Boris Tolochko ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Current Status ◽  
X Ray Diffraction ◽  
X Ray ◽  
Heat Loads
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