Methods for Displaying Defocus and Astigmatism of High Resolution Stem Images

Author(s):  
William Krakow

Focussing and stigmation of the objective lens for high resolution STEM imaging is usually achieved by repeated reduced area scans of a given specimen area under manual control of the instrument. This method is particularly laborious since the scan times for images can be upwards of several seconds which subjects a specimen to unwanted electron beam exposure. Methods have been proposed to optimize STEM images such as the use of shadow images1 where a fixed beam pattern for a highly defocussed objective lens is observed. This method again requires a high beam dose in a given specimen area. Alternately, if a white noise object such as a carbon film is used, granular image features without any directionality are desired. In this case the eye must integrate over a large number of small image features. A better alternative is the use computer control to digitize images in real time and compute the power spectrum of an image could be employed. This would require a dedicated high speed computer system for a 1000 × 1000 display, but this latter method would have the advantage that only a single scan of image is required.

Author(s):  
T. Yanaka ◽  
K. Shirota

It is significant to note field aberrations (chromatic field aberration, coma, astigmatism and blurring due to curvature of field, defined by Glaser's aberration theory relative to the Blenden Freien System) of the objective lens in connection with the following three points of view; field aberrations increase as the resolution of the axial point improves by increasing the lens excitation (k2) and decreasing the half width value (d) of the axial lens field distribution; when one or all of the imaging lenses have axial imperfections such as beam deflection in image space by the asymmetrical magnetic leakage flux, the apparent axial point has field aberrations which prevent the theoretical resolution limit from being obtained.


1997 ◽  
Vol 3 (S2) ◽  
pp. 1093-1094
Author(s):  
M. Pan ◽  
K. Ishizuka ◽  
C. E. Meyer ◽  
O. L. Krivanek ◽  
J. Sasakit ◽  
...  

All the lenses, deflectors and stigmators of contemporary electron microscopes are controlled digitally by an internal computer. Control through RS232 serial interface by an external computer has also become a standard feature. This external control has made so-called computer assisted electron microscopy (CAEM) possible and practical. We are developing a CAEM system with two objectives: (1) to free inexperienced microscopists from technical details of operating an electron microscope, especially transmission electron microscopes (TEM); (2) to assist experienced microscopists to operate their microscopes with higher accuracy and efficiency. The features include automated and/or assisted standard operations in focusing, stigmating, and aligning the microscope, and also sophisticated tuning that requires the evaluation of subtle changes in image features such as aligning the incident electron beam direction in the presence of 3-fold astigmatism in objective lens. CAEM can further assist operators in selecting areas or objects and taking images/diffraction/energy spectrum with all the parameters well controlled and catalogued together, thus not only enabling ease-of-use and high accuracy in operation but also yielding more information on the specimen.


Author(s):  
D.R. Ensor ◽  
C.G. Jensen ◽  
J.A. Fillery ◽  
R.J.K. Baker

Because periodicity is a major indicator of structural organisation numerous methods have been devised to demonstrate periodicity masked by background “noise” in the electron microscope image (e.g. photographic image reinforcement, Markham et al, 1964; optical diffraction techniques, Horne, 1977; McIntosh,1974). Computer correlation analysis of a densitometer tracing provides another means of minimising "noise". The correlation process uncovers periodic information by cancelling random elements. The technique is easily executed, the results are readily interpreted and the computer removes tedium, lends accuracy and assists in impartiality.A scanning densitometer was adapted to allow computer control of the scan and to give direct computer storage of the data. A photographic transparency of the image to be scanned is mounted on a stage coupled directly to an accurate screw thread driven by a stepping motor. The stage is moved so that the fixed beam of the densitometer (which is directed normal to the transparency) traces a straight line along the structure of interest in the image.


Author(s):  
Louis T. Germinario

A liquid nitrogen stage has been developed for the JEOL JEM-100B electron microscope equipped with a scanning attachment. The design is a modification of the standard JEM-100B SEM specimen holder with specimen cooling to any temperatures In the range ~ 55°K to room temperature. Since the specimen plane is maintained at the ‘high resolution’ focal position of the objective lens and ‘bumping’ and thermal drift la minimized by supercooling the liquid nitrogen, the high resolution capability of the microscope is maintained (Fig.4).


Author(s):  
H. Tochigi ◽  
H. Uchida ◽  
S. Shirai ◽  
K. Akashi ◽  
D. J. Evins ◽  
...  

A New High Excitation Objective Lens (Second-Zone Objective Lens) was discussed at Twenty-Sixth Annual EMSA Meeting. A new commercially available Transmission Electron Microscope incorporating this new lens has been completed.Major advantages of the new instrument allow an extremely small beam to be produced on the specimen plane which minimizes specimen beam damages, reduces contamination and drift.


Author(s):  
Michael Beer ◽  
J. W. Wiggins ◽  
David Woodruff ◽  
Jon Zubin

A high resolution scanning transmission electron microscope of the type developed by A. V. Crewe is under construction in this laboratory. The basic design is completed and construction is under way with completion expected by the end of this year.The optical column of the microscope will consist of a field emission electron source, an accelerating lens, condenser lens, objective lens, diffraction lens, an energy dispersive spectrometer, and three electron detectors. For any accelerating voltage the condenser lens function to provide a parallel beam at the entrance of the objective lens. The diffraction lens is weak and its current will be controlled by the objective lens current to give an electron diffraction pattern size which is independent of small changes in the objective lens current made to achieve focus at the specimen. The objective lens demagnifies the image of the field emission source so that its Gaussian size is small compared to the aberration limit.


Author(s):  
J.R. Parsons ◽  
C.W. Hoelke

The direct imaging of a crystal lattice has intrigued electron microscopists for many years. What is of interest, of course, is the way in which defects perturb their atomic regularity. There are problems, however, when one wishes to relate aperiodic image features to structural aspects of crystalline defects. If the defect is inclined to the foil plane and if, as is the case with present 100 kV transmission electron microscopes, the objective lens is not perfect, then terminating fringes and fringe bending seen in the image cannot be related in a simple way to lattice plane geometry in the specimen (1).The purpose of the present work was to devise an experimental test which could be used to confirm, or not, the existence of a one-to-one correspondence between lattice image and specimen structure over the desired range of specimen spacings. Through a study of computed images the following test emerged.


Author(s):  
Earl J. Kirkland ◽  
Robert J. Keyse

An ultra-high resolution pole piece with a coefficient of spherical aberration Cs=0.7mm. was previously designed for a Vacuum Generators HB-501A Scanning Transmission Electron Microscope (STEM). This lens was used to produce bright field (BF) and annular dark field (ADF) images of (111) silicon with a lattice spacing of 1.92 Å. In this microscope the specimen must be loaded into the lens through the top bore (or exit bore, electrons traveling from the bottom to the top). Thus the top bore must be rather large to accommodate the specimen holder. Unfortunately, a large bore is not ideal for producing low aberrations. The old lens was thus highly asymmetrical, with an upper bore of 8.0mm. Even with this large upper bore it has not been possible to produce a tilting stage, which hampers high resolution microscopy.


Author(s):  
E. L. Buhle ◽  
U. Aebi

CTEM brightfield images are formed by a combination of relatively high resolution elastically scattered electrons and unscattered and inelastically scattered electrons. In the case of electron spectroscopic images (ESI), the inelastically scattered electrons cause a loss of both contrast and spatial resolution in the image. In the case of ESI imaging on the Zeiss EM902, the transmited electrons are dispersed into their various energy components by passing them through a magnetic prism spectrometer; a slit is then placed in the image plane of the prism to select the electrons of a given energy loss for image formation. The purpose of this study was to compare CTEM with ESI images recorded on a Zeiss EM902 of ordered protein arrays. Digital image processing was employed to analyze the average unit cell morphologies of the two types of images.


Author(s):  
Kenneth H. Downing

Three-dimensional structures of a number of samples have been determined by electron crystallography. The procedures used in this work include recording images of fairly large areas of a specimen at high tilt angles. There is then a large defocus ramp across the image, and parts of the image are far out of focus. In the regions where the defocus is large, the contrast transfer function (CTF) varies rapidly across the image, especially at high resolution. Not only is the CTF then difficult to determine with sufficient accuracy to correct properly, but the image contrast is reduced by envelope functions which tend toward a low value at high defocus.We have combined computer control of the electron microscope with spot-scan imaging in order to eliminate most of the defocus ramp and its effects in the images of tilted specimens. In recording the spot-scan image, the beam is scanned along rows that are parallel to the tilt axis, so that along each row of spots the focus is constant. Between scan rows, the objective lens current is changed to correct for the difference in specimen height from one scan to the next.


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