Structural, Chemical And Electronic Characterization Of Ceramic Materials Using Quantitative (Scanning) Transmission Electron Microscopy.

2007 ◽  
Vol 13 (S03) ◽  
Author(s):  
S Bals ◽  
S Van Aert ◽  
J Verbeeck ◽  
G Van Tendeloo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Ceramic Materials ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

2004 ◽  
Vol 10 (S02) ◽  
pp. 290-291
Author(s):  
Susanne Stemmer ◽  
Melody D Agustin ◽  
Yan Yang ◽  
Steffen Schmidt ◽  
Brendan Foran ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Advanced Characterization ◽  
Gate Stacks ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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