Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

Susanne Stemmer; Melody D Agustin; Yan Yang; Steffen Schmidt; Brendan Foran; Gennadi Bersuker; D G Schlom

doi:10.1017/s1431927604886343

Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927604886343 ◽

2004 ◽

Vol 10 (S02) ◽

pp. 290-291

Author(s):

Susanne Stemmer ◽

Melody D Agustin ◽

Yan Yang ◽

Steffen Schmidt ◽

Brendan Foran ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Advanced Characterization ◽

Gate Stacks ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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Characterization of core/shell bi-metallic cube-shaped nanoparticles with scanning transmission electron microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927615006133 ◽

2015 ◽

Vol 21 (S3) ◽

pp. 1069-1070

Author(s):

Dalaver H. Anjum ◽

Akshaya Samal ◽

Manuel A. Roldan-Gutierrez

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Core Shell ◽

Scanning Transmission Electron ◽

Shaped Nanoparticles ◽

Transmission Electron ◽

Scanning Transmission

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Atomic Characterization of Byproduct Nanoparticles on Cesium Lead Halide Nanocrystals Using High-Resolution Scanning Transmission Electron Microscopy

Crystals ◽

10.3390/cryst8010002 ◽

2017 ◽

Vol 8 (1) ◽

pp. 2 ◽

Cited By ~ 12

Author(s):

Mian Zhang ◽

Hongbo Li ◽

Qiang Jing ◽

Zhenda Lu ◽

Peng Wang

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Scanning Transmission Electron Microscopy ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission ◽

Lead Halide

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Characterization of a Layered Lithium Manganese-rich Oxide Cathode Material via Scanning Transmission Electron Microscopy

Microscopy and Microanalysis ◽

10.1017/s1431927614004218 ◽

2014 ◽

Vol 20 (S3) ◽

pp. 498-499 ◽

Cited By ~ 2

Author(s):

Aaron C. Johnston-Peck ◽

Leonid A. Bendersky ◽

Andrew A. Herzing

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Cathode Material ◽

Scanning Transmission Electron Microscopy ◽

Scanning Transmission Electron ◽

Oxide Cathode ◽

Lithium Manganese ◽

Transmission Electron ◽

Scanning Transmission

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Microstructural and compositional characterization of a new silicon carbide nanocables using scanning transmission electron microscopy

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/s1386-9477(02)00444-7 ◽

2002 ◽

Vol 15 (1) ◽

pp. 1-5 ◽

Cited By ~ 13

Author(s):

D.P Yu ◽

Y.J Xing ◽

M Tence ◽

H.Y Pan ◽

Y Leprince-Wang

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Silicon Carbide ◽

Scanning Transmission Electron Microscopy ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission ◽

Compositional Characterization

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Characterization of paired helical filaments by scanning transmission electron microscopy

Microscopy Research and Technique ◽

10.1002/jemt.20188 ◽

2005 ◽

Vol 67 (3-4) ◽

pp. 126-140 ◽

Cited By ~ 27

Author(s):

Hanna Ksiezak-Reding ◽

Joseph S. Wall

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Paired Helical Filaments ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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Characterization of Grain Boundaries by Scanning Transmission Electron Microscopy.

Materia Japan ◽

10.2320/materia.37.938 ◽

1998 ◽

Vol 37 (11) ◽

pp. 938-944

Author(s):

Kenji Kaneko ◽

Sadahiro Tsurekawa ◽

Isao Tanaka

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Grain Boundaries ◽

Scanning Transmission Electron Microscopy ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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Atomic structure characterization of stacking faults on the {11¯00} plane in α-alumina by scanning transmission electron microscopy

10.1063/1.4961356 ◽

2016 ◽

Cited By ~ 2

Author(s):

Eita Tochigi ◽

Scott D. Findlay ◽

Eiji Okunishi ◽

Teruyasu Mizoguchi ◽

Atsutomo Nakamura ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Atomic Structure ◽

Scanning Transmission Electron Microscopy ◽

Stacking Faults ◽

Structure Characterization ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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High Resolution Scanning Transmission Electron Microscopy (STEM) and Luminescence Characterization of ZnS/ZnSe Multi Quantum Wells (MQW) Grown by MOVPE

Sixth International Conference Metalorganic Vapor Phase Epitaxy ◽

10.1109/movpe.1992.665045 ◽

2005 ◽

Author(s):

B. Bollig ◽

P. Thorhauer ◽

E. Kubaleki ◽

J. Sollner ◽

F.E.G. Guimaraes ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Quantum Wells ◽

Scanning Transmission Electron Microscopy ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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Scanning Transmission Electron Microscopy Studies of Interface Stability and Point Defects in Gate Stacks with High-k Dielectrics

ECS Transactions ◽

10.1149/1.2981600 ◽

2019 ◽

Vol 16 (5) ◽

pp. 177-183

Author(s):

Susanne Stemmer ◽

Melody P. Agustin ◽

Dmitri O. Klenov

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Point Defects ◽

Scanning Transmission Electron Microscopy ◽

Gate Stacks ◽

Interface Stability ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

High K ◽

Scanning Transmission

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Structural, Chemical And Electronic Characterization Of Ceramic Materials Using Quantitative (Scanning) Transmission Electron Microscopy.

Microscopy and Microanalysis ◽

10.1017/s1431927607081664 ◽

2007 ◽

Vol 13 (S03) ◽

Author(s):

S Bals ◽

S Van Aert ◽

J Verbeeck ◽

G Van Tendeloo

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Ceramic Materials ◽

Scanning Transmission Electron ◽

Transmission Electron ◽

Scanning Transmission

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