Practical Measurement of X-ray Detection Performance of a Large Solid-Angle Silicon Drift Detector in an Aberration-Corrected STEM

The ultimate sensitivity of microchemical analysis using x-ray emission rests in selecting those experimental conditions which will maximize the measured peak-to-background (P/B) ratio. This paper presents the results of calculations aimed at determining the influence of incident beam energy, detector/specimen geometry and specimen composition on the P/B ratio for ideally thin samples (i.e., the effects of scattering and absorption are considered negligible). As such it is assumed that the complications resulting from system peaks, bremsstrahlung fluorescence, electron tails and specimen contamination have been eliminated and that one needs only to consider the physics of the generation/emission process.The number of characteristic x-ray photons (Ip) emitted from a thin foil of thickness dt into the solid angle dΩ is given by the well-known equation

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High spatial resolution x-ray microanalysis of interfaces

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100137793 ◽

1995 ◽

Vol 53 ◽

pp. 284-285

Author(s):

J. R. Michael

Keyword(s):

Spatial Resolution ◽

Electron Probe ◽

Solid Angle ◽

Collection Efficiency ◽

Spatial Scales ◽

Energy Dispersive Spectrometer ◽

X Rays ◽

X Ray ◽

Probe Size ◽

Brightness Field

X-ray microanalysis in the analytical electron microscope (AEM) refers to a technique by which chemical composition can be determined on spatial scales of less than 10 nm. There are many factors that influence the quality of x-ray microanalysis. The minimum probe size with sufficient current for microanalysis that can be generated determines the ultimate spatial resolution of each individual microanalysis. However, it is also necessary to collect efficiently the x-rays generated. Modern high brightness field emission gun equipped AEMs can now generate probes that are less than 1 nm in diameter with high probe currents. Improving the x-ray collection solid angle of the solid state energy dispersive spectrometer (EDS) results in more efficient collection of x-ray generated by the interaction of the electron probe with the specimen, thus reducing the minimum detectability limit. The combination of decreased interaction volume due to smaller electron probe size and the increased collection efficiency due to larger solid angle of x-ray collection should enhance our ability to study interfacial segregation.

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Comparison of high-angle take-off and low-angle take-off EDX detector geometry of the HF-2000 FE-TEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100147107 ◽

1993 ◽

Vol 51 ◽

pp. 252-253

Author(s):

Y. Sato ◽

T. Hashimoto ◽

M. Ichihashi ◽

Y. Ueki ◽

K. Hirose ◽

...

Keyword(s):

Quantitative Analysis ◽

Field Emission ◽

Solid Angle ◽

Energy Dispersive ◽

Objective Lens ◽

X Rays ◽

High Angle ◽

X Ray ◽

Detector Geometry

Analytical TEMs have two variations in x-ray detector geometry, high and low angle take off. The high take off angle is advantageous for accuracy of quantitative analysis, because the x rays are less absorbed when they go through the sample. The low take off angle geometry enables better sensitivity because of larger detector solid angle.Hitachi HF-2000 cold field emission TEM has two versions; high angle take off and low angle take off. The former allows an energy dispersive x-ray detector above the objective lens. The latter allows the detector beside the objective lens. The x-ray take off angle is 68° for the high take off angle with the specimen held at right angles to the beam, and 22° for the low angle take off. The solid angle is 0.037 sr for the high angle take off, and 0.12 sr for the low angle take off, using a 30 mm2 detector.

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