Health monitoring devices using a strain sensor, which shows high sensitivity and large deformability, are strongly demanded due to further aging of society with fewer children. Conventional strain sensors, such as metallic strain gauges and semiconductive strain sensors, however, aren’t applicable to health monitoring because of their low sensitivity and deformability. In this study, fundamental design of area-arrayed graphene nano-ribbon (GNR) strain senor was proposed in order to fabricate next-generation strain sensor. The sensor was consisted of two sections, which are stress concentration section and stress detecting section. This structure can take full advantage of GNR’s properties. Moreover, high quality GNR fabrication process, which is one of the important process in the sensor, was developed by applying CVD (Chemical Vapor Deposition) method. Top-down approach was applied to fabricate the GNR. At first, in order to synthesize a high-quality graphene sheet, acetylene-based LPCVD (low pressure chemical vapor deposition) using a closed Cu foil was employed. After that, graphene was transferred silicon substrate and the quality was evaluated. The high quality graphene was transferred on the soft PDMS substrate and metallic electrodes were fabricated by applying MEMS technology. Area-arrayed fine pin structure was fabricated by using hard PDMS as a stress-concentration section. Finally, both sections were integrated to form a highly sensitive and large deformable pressure sensor. The strain sensitivity of the GNR-base sensor was also evaluated.
Step-edge-induced resistance anisotropy in quasi-free-standing bilayer chemical vapor deposition graphene on SiC
