Thermodynamics of Ion-Cutting of β-Ga2O3 and Wafer-Scale Heterogeneous Integration of a β-Ga2O3 Thin Film onto a Highly Thermal Conductive SiC Substrate

Author(s):  
Wenhui Xu ◽  
Tiangui You ◽  
Fengwen Mu ◽  
Zhenghao Shen ◽  
Jiajie Lin ◽  
...  
2021 ◽  
pp. 149619
Author(s):  
Manni Chen ◽  
Zhipeng Zhang ◽  
Runze Zhan ◽  
Juncong She ◽  
Shaozhi Deng ◽  
...  

2006 ◽  
Vol 89 (18) ◽  
pp. 182906 ◽  
Author(s):  
Sang-A Lee ◽  
Jae-Yeol Hwang ◽  
Jong-Pil Kim ◽  
Se-Young Jeong ◽  
Chae-Ryong Cho

2011 ◽  
Vol 110 (11) ◽  
pp. 114117 ◽  
Author(s):  
Dai-Ying Lee ◽  
Tseung-Yuen Tseng

Author(s):  
Hiroyuki NISHINAKA ◽  
Osamu Ueda ◽  
Yusuke Ito ◽  
Noriaki IKENAGA ◽  
Noriyuki Hasuike ◽  
...  

Abstract We demonstrated the growth of a single-domain κ-Ga2O3 thin film on ε-GaFeO3 by using an organic-free compound as a precursor for mist chemical vapor deposition. X-ray diffraction analysis revealed that an 87-nm-thick κ-Ga2O3 thin film was grown almost coherently with slight lattice relaxation. The surface morphology of the κ-Ga2O3 thin film exhibited a step-terrace structure without island growth. Furthermore, plan-view TEM observations revealed that the κ-Ga2O3 thin film grown on ε-GaFeO3 had a single domain, whereas the previously reported κ-Ga2O3 thin film grown on AlN template had a domain structure.


Author(s):  
Sunjae Kim ◽  
Sangheon Jeon ◽  
Seon Yeong Chae ◽  
Myunghun Shin ◽  
Jong Hyun Seo ◽  
...  

2011 ◽  
Vol 1291 ◽  
Author(s):  
L. Magdenko ◽  
E. Popova ◽  
W. Smigaj ◽  
P. Beauvillain ◽  
N. Keller ◽  
...  

ABSTRACTMagneto-optical garnet based optical circulator was designed and fabricated with wafer-scale technology. Modeling and simulation strategy is established for the optimization of a new design of circulator based on ring cavity. Wafer-scale technological process is developed and demonstrated allowing fabrication of the optimized BIG/GGG buried ring circulator.


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