Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

2018 ◽  
Vol 10 (16) ◽  
pp. 14116-14123 ◽  
Author(s):  
Xin Meng ◽  
Harrison Sejoon Kim ◽  
Antonio T. Lucero ◽  
Su Min Hwang ◽  
Joy S. Lee ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Cathode Plasma ◽  
Layer Deposition

Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS)

2019 ◽  
Vol 89 (3) ◽  
pp. 63-69 ◽  
Author(s):  
Su Min Hwang ◽  
Aswin L. N. Kondusamy ◽  
Zhiyang Qin ◽  
Harrison Sejoon Kim ◽  
Xin Meng ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Cathode Plasma ◽  
Layer Deposition

Exploring Inherently Selective Plasma Processing of Nitrides and Oxides Via Hollow-Cathode Plasma-Assisted Atomic Layer Deposition

2020 ◽  
Vol MA2020-02 (23) ◽  
pp. 1664-1664
Author(s):  
Adnan Mohammad ◽  
Saidjafarzoda Ilhom ◽  
Deepa Shukla ◽  
Brian Willis ◽  
Ali K. Okyay ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Plasma Processing ◽  
Atomic Layer ◽  
Cathode Plasma ◽  
Layer Deposition

scholarly journals Fabrication of flexible polymer–GaN core–shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition

2015 ◽  
Vol 3 (20) ◽  
pp. 5199-5206 ◽  
Author(s):  
Cagla Ozgit-Akgun ◽  
Fatma Kayaci ◽  
Sesha Vempati ◽  
Ali Haider ◽  
Asli Celebioglu ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Core Shell ◽  
Cathode Plasma ◽  
Flexible Polymer ◽  
Layer Deposition ◽  
Ceramic Nanofibers

Flexible polymer–GaN nanofibers were fabricated at a temperature much lower than that needed for the preparation of GaN ceramic nanofibers.

scholarly journals Understanding the role of rf-power on AlN film properties in hollow-cathode plasma-assisted atomic layer deposition

2020 ◽  
Vol 38 (2) ◽  
pp. 022405 ◽  
Author(s):  
Saidjafarzoda Ilhom ◽  
Deepa Shukla ◽  
Adnan Mohammad ◽  
John Grasso ◽  
Brian Willis ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hollow Cathode ◽  
Atomic Layer ◽  
Rf Power ◽  
Cathode Plasma ◽  
Film Properties ◽  
Layer Deposition ◽  
Aln Film
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