Real-time in situ ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition
2019 ◽
Vol 37
(2)
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pp. 020927
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2021 ◽
Vol 39
(2)
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pp. 022406
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2018 ◽
Vol 89
(12)
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pp. 123702
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2014 ◽
Vol 32
(3)
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pp. 031508
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2018 ◽
Vol 36
(1)
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pp. 01A110
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2015 ◽
Vol 3
(20)
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pp. 5199-5206
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