Huge Photoresistance in Transparent and Conductive Indium Titanium Oxide Films Prepared by Electron Beam–Physical Vapor Deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Selective area chemical vapor deposition of titanium oxide films: Characterization of Ti(OC[sub 3]H[sub 7])[sub 4] as an electron beam resist

10.1116/1.590801 ◽

1999 ◽

Vol 17 (4) ◽

pp. 1622 ◽

Cited By ~ 8

Author(s):

William J. Mitchell ◽

Evelyn L. Hu

Keyword(s):

Electron Beam ◽

Titanium Oxide ◽

Vapor Deposition ◽

Oxide Films ◽

Chemical Vapor ◽

Selective Area ◽

Ion-assisted electron-beam evaporation of carbon-doped titanium oxide films as visible-light photocatalyst

Thin Solid Films ◽

10.1016/j.tsf.2006.10.113 ◽

2007 ◽

Vol 515 (7-8) ◽

pp. 3521-3526 ◽

Cited By ~ 43

Author(s):

Shih-Wei Hsu ◽

Tien-Syh Yang ◽

Ta-Kun Chen ◽

Ming-Show Wong

Keyword(s):

Electron Beam ◽

Visible Light ◽

Titanium Oxide ◽

Oxide Films ◽

Visible Light Photocatalyst ◽

Carbon Doped ◽

Nitrogen-doped titanium oxide films as visible light photocatalyst by vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2004.06.189 ◽

2004 ◽

Vol 469-470 ◽

pp. 1-5 ◽

Cited By ~ 66

Author(s):

Min-Chi Yang ◽

Tien-Syh Yang ◽

Ming-Show Wong

Keyword(s):

Visible Light ◽

Titanium Oxide ◽

Vapor Deposition ◽

Oxide Films ◽

Visible Light Photocatalyst ◽

Nitrogen Doped ◽

Plasma-Assisted Chemical Vapor Deposition of Titanium Oxide Films by Dielectric Barrier Discharge in TiCl4/O2/N2Gas Mixtures

Plasma Science and Technology ◽

10.1088/1009-0630/16/7/11 ◽

2014 ◽

Vol 16 (7) ◽

pp. 695-700

Author(s):

Jinhai Niu ◽

Zhihui Zhang ◽

Hongyu Fan ◽

Qi Yang ◽

Dongping Liu ◽

...

Keyword(s):

Titanium Oxide ◽

Dielectric Barrier Discharge ◽

Vapor Deposition ◽

Barrier Discharge ◽

Oxide Films ◽

Chemical Vapor ◽

Dielectric Barrier ◽

Evaluation of photocatalytic properties of titanium oxide films prepared by plasma-enhanced chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2005.05.007 ◽

2005 ◽

Vol 489 (1-2) ◽

pp. 320-324 ◽

Cited By ~ 30

Author(s):

Masahiko Maeda ◽

Teruyoshi Watanabe

Keyword(s):

Titanium Oxide ◽

Vapor Deposition ◽

Oxide Films ◽

Chemical Vapor ◽

Photocatalytic Properties ◽

Atmospheric growth and strong visible luminescence of anatase titanium oxide films with various orientations

Journal of Materials Chemistry A ◽

10.1039/c4ta00730a ◽

2014 ◽

Vol 2 (19) ◽

pp. 6708-6713 ◽

Cited By ~ 5

Author(s):

M. L. Li ◽

G. S. Huang ◽

D. X. Wang ◽

J. Zhang ◽

J. J. Shi ◽

...

Keyword(s):

Titanium Oxide ◽

Vapor Deposition ◽

Oxide Films ◽

Visible Luminescence ◽

Reactive Plasma ◽

Oriented anatase TiO2 films with visible luminescence and various nano-morphologies have been grown by TiCl4–O2–Ar reactive plasma vapor deposition.

Photoconductive Characteristics of Hydro-Oxygenated Amorphous Titanium Oxide Films Prepared by Remote Plasma-Enhanced Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.4183 ◽

2006 ◽

Vol 45 (5A) ◽

pp. 4183-4186 ◽

Cited By ~ 7

Author(s):

Koichi Sakaguchi ◽

Koichi Shimakawa ◽

Yoshinori Hatanaka

Keyword(s):

Titanium Oxide ◽

Vapor Deposition ◽

Oxide Films ◽

Chemical Vapor ◽

Remote Plasma ◽

Effect of N2 ion flux on the photocatalysis of nitrogen-doped titanium oxide films by electron-beam evaporation

Applied Surface Science ◽

10.1016/j.apsusc.2005.05.070 ◽

2006 ◽

Vol 252 (10) ◽

pp. 3729-3736 ◽

Cited By ~ 91

Author(s):

Tien-Syh Yang ◽

Min-Chi Yang ◽

Ching-Bin Shiu ◽

Wen-Ku Chang ◽

Ming-Show Wong

Keyword(s):

Electron Beam ◽

Titanium Oxide ◽

Oxide Films ◽

Ion Flux ◽

Nitrogen Doped ◽

Titanium oxide films on Si(100) deposited by electron-beam evaporation at 250 °C

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582275 ◽

2000 ◽

Vol 18 (3) ◽

pp. 917-921 ◽

Cited By ~ 30

Author(s):

H. K. Jang ◽

S. W. Whangbo ◽

H. B. Kim ◽

K. Y. Im ◽

Y. S. Lee ◽

...

Keyword(s):

Electron Beam ◽

Titanium Oxide ◽

Oxide Films ◽

Structure and hydrophilicity of titanium oxide films prepared by electron beam evaporation

Surface Science ◽

10.1016/j.susc.2003.10.044 ◽

2004 ◽

Vol 548 (1-3) ◽

pp. 75-82 ◽

Cited By ~ 87

Author(s):

Tien-Syh Yang ◽

Ching-Bin Shiu ◽

Ming-Show Wong

Keyword(s):

Electron Beam ◽

Titanium Oxide ◽

Oxide Films ◽