Fast and safe microwave-assisted glass channel-shaped microstructure fabrication

Microwave-assisted wet etching intensifies the glass etching action under safe working and finely monitored operative conditions and it produces smooth deep channels in short processing times with reduced underetching effects.

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Strategies for Defect-Free and Deep Wet Etching of Pyrex 7740

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.645-646.21 ◽

2015 ◽

Vol 645-646 ◽

pp. 21-25

Author(s):

Zhan Zhan ◽

Ling Ke Yu ◽

Cheng Zheng ◽

Jian Fa Cai ◽

Dao Heng Sun ◽

...

Keyword(s):

High Temperature ◽

Wet Etching ◽

Pyrex Glass ◽

Solution Component ◽

Etched Surface ◽

20 Nm ◽

Glass Etching ◽

Pyrex 7740

In this paper, two aspects in the wet glass etching, the pre-annealing of the glass and the mask process, are taken into consideration to achieve the deep and defect-free wet etching of Pyrex glass. Compared with the conventional strategies, i.e.,HFsolution component and mask kinds, our experiment results prove the pre-annealing is another key role to obtain theoretical isotropy character in wet etching. Besides, the high temperature pre-annealing dramatically improves the structure profiles and reduces the notching defects. Additionally, a novel multilayer mask process is proposed. With 1.5μmPR/ 100nmAu/ 100 nmAu/ 20 nmCrmask and > 450 °C pre-annealing, > 150 μm deep and non-pin-holes Pyrex glass structures are achieved and the roughness of etched surface is lower than 1 nm.

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Microwave Assisted Chemical Vapor Infiltration

MRS Proceedings ◽

10.1557/proc-250-245 ◽

1991 ◽

Vol 250 ◽

Cited By ~ 6

Author(s):

D. J. Devlin ◽

R. P. Currier ◽

R. S. Barbero ◽

B. F. Espinoza ◽

N. Elliott

Keyword(s):

Chemical Vapor ◽

Ceramic Matrix Composites ◽

Chemical Vapor Infiltration ◽

Thermal Gradients ◽

Matrix Composites ◽

Microwave Assisted ◽

Processing Times ◽

Optical Thermometry ◽

Complex Shapes ◽

Vapor Infiltration

AbstractA microwave assisted process for production of continuous fiber reinforced ceramic matrix composites is described. A simple apparatus combining a chemical vapor infiltration reactor with a conventional 700 W multimode oven is described. Microwave induced inverted thermal gradients are exploited with the ultimate goal of reducing processing times on complex shapes. Thermal gradients in stacks of SiC (Nicalon) cloths have been measured using optical thermometry. Initial results on the “inside out” deposition of SiC via decomposition of methyltrichlorosilane in hydrogen are presented. Several key processing issues are identified and discussed.

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The use of Microwave-Assisted Processing for the Production of High Tc Superconductors

MRS Proceedings ◽

10.1557/proc-430-213 ◽

1996 ◽

Vol 430 ◽

Author(s):

A. T. Rowley ◽

F. C. R. Wroe

Keyword(s):

Heating Rates ◽

Fast Heating ◽

Simultaneous Application ◽

Practical Applications ◽

Precise Control ◽

Microwave Assisted ◽

Processing Times ◽

Current Densities ◽

The Impact ◽

Microwave Effects

AbstractHigh critical temperature superconducting (HTcS) bulk ceramics with the high values of critical current densities (Jc) necessary for practical applications, are only achieved through careful control of the material microstructure. Consequently, many stages in the production of HTcSs are extremely time consuming; often taking a number of days to proceed to completion, and usually requiring precise control of sample temperature.The volumetric nature of microwave heating will clearly have an impact on the processing of large quantities of these materials, particularly when it is balanced with the simultaneous application of radiant heating. In this way, the production of thermal gradients can be avoided, even when relatively fast heating rates (for these materials) are used.Perhaps more interesting, is the possibility of non-thermal microwave effects (due to the presence of an electric field) enhancing the processing times and even the material properties of HTcSs.This work assesses the impact of microwave-assisted processing on a number of stages involved in the production of bulk pieces of Bi-2212 and Y-123 based superconductors, and demonstrates quite clearly that non-thermal as well as thermal microwave effects are relevant to these materials.

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A new tool for rapid development of electron microscopy negatives and micrographs: Initial impressions of the MOHR/PRO-8 processor

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100129498 ◽

1992 ◽

Vol 50 (2) ◽

pp. 972-973

Author(s):

James C. Long

Keyword(s):

Electron Microscopy ◽

Processing Time ◽

Rapid Development ◽

Processing Times ◽

Initial Impressions ◽

Transport Method

Over the years, many techniques and products have been developed to reduce the amount of time spent in a darkroom processing electron microscopy negatives and micrographs. One of the latest tools, effective in this effort, is the Mohr/Pro-8 film and rc paper processor.At the time of writing, a unit has been recently installed in the photographic facilities of the Electron Microscopy Center at Texas A&M University. It is being evaluated for use with TEM sheet film, SEM sheet film, 35mm roll film (B&W), and rc paper.Originally designed for use in the phototypesetting industry, this processor has only recently been introduced to the field of electron microscopy.The unit is a tabletop model, approximately 1.5 × 1.5 × 2.0 ft, and uses a roller transport method of processing. It has an adjustable processing time of 2 to 6.5 minutes, dry-to-dry. The installed unit has an extended processing switch, enabling processing times of 8 to 14 minutes to be selected.

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