Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor
2016 ◽
Vol 4
(10)
◽
pp. 1945-1952
◽
Keyword(s):
Self-limiting growth of high quality binary BaO and BaTiO3 using a novel class of Ba precursor at lowest temperature ever reported and shown to cover non planar structures.