Interfacial catalysis in and initial reaction mechanism of Al2O3 films fabricated by atomic layer deposition using non-hydrolytic sol–gel chemistry

2016 ◽  
Vol 18 (45) ◽  
pp. 31223-31229 ◽  
Author(s):  
Lina Xu ◽  
Guoyong Fang ◽  
Yanqiang Cao ◽  
Aidong Li
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Sol Gel ◽  
Atomic Layer ◽  
Initial Reaction ◽  
Metal Alkoxides ◽  
Alkyl Groups ◽  
Layer Deposition ◽  
Interfacial Catalysis ◽  
Al2o3 Films

DFT investigation shows that metal alkoxides can directly form M–O bonds through strong chemisorption and interfacial interactions between alkyl groups and the surface can catalyze the elimination of alkyl groups through interfacial catalysis.

Initial reaction mechanism of nitrogen-doped zinc oxide with atomic layer deposition

2009 ◽  
Vol 517 (15) ◽  
pp. 4355-4359 ◽  
Author(s):  
Lin Dong ◽  
Qing-Qing Sun ◽  
Yu Shi ◽  
Hao-Wen Guo ◽  
Han Liu ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Initial Reaction ◽  
Nitrogen Doped ◽  
Layer Deposition

Initial reaction mechanism of H-passivated Ge surface passivation by atomic layer deposition of Al2O3 and AlN

2011 ◽  
Vol 519 (18) ◽  
pp. 6000-6003 ◽  
Author(s):  
Yan Xu ◽  
Lin Chen ◽  
Qing-Qing Sun ◽  
Peng-Fei Wang ◽  
Shi-Jin Ding ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Surface Passivation ◽  
Atomic Layer ◽  
Initial Reaction ◽  
Layer Deposition

Reaction Mechanism of Atomic Layer Deposition of Aluminum Sulfide using Trimethylaluminum and Hydrogen Sulfide

2021 ◽  
Author(s):  
Yanghong Yu ◽  
Zhongchao Zhou ◽  
Lina Xu ◽  
Yihong Ding ◽  
Guoyong Fang
Keyword(s):  
Hydrogen Sulfide ◽  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Metal Sulfides ◽  
Layer Deposition

Atomic layer deposition (ALD) is a nanopreparation technique for materials and is widely used in the fields of microelectronics, energy and catalysis. ALD methods for metal sulfides, such as Al2S3...

Reaction Mechanism of Pt Atomic Layer Deposition on Various Textile Surfaces

2019 ◽  
Vol 31 (21) ◽  
pp. 8995-9002
Author(s):  
Il-Kwon Oh ◽  
Jong Seo Park ◽  
Mohammad Rizwan Khan ◽  
Kangsik Kim ◽  
Zonghoon Lee ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Reaction Mechanism Underlying Atomic Layer Deposition of Antimony Telluride Thin Films

2016 ◽  
Vol 16 (5) ◽  
pp. 4924-4928 ◽  
Author(s):  
Byeol Han ◽  
Yu-Jin Kim ◽  
Jae-Min Park ◽  
Luchana L Yusup ◽  
Hana Ishii ◽  
...  
Keyword(s):  
Thin Films ◽  
Reaction Mechanism ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Antimony Telluride ◽  
Layer Deposition

Substrate dependence on the optical properties of Al2O3 films grown by atomic layer deposition

1997 ◽  
Vol 71 (25) ◽  
pp. 3604-3606 ◽  
Author(s):  
Y. Kim ◽  
S. M. Lee ◽  
C. S. Park ◽  
S. I. Lee ◽  
M. Y. Lee
Keyword(s):  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Substrate Dependence ◽  
Al2o3 Films

Sol-Gel Chemistry and Atomic Layer Deposition

2012 ◽  
pp. 61-82 ◽  
Author(s):  
Guylhaine Clavel ◽  
Catherine Marichy ◽  
Nicola Pinna
Keyword(s):  
Atomic Layer Deposition ◽  
Sol Gel ◽  
Atomic Layer ◽  
Layer Deposition
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