Introducing the concept of pulsed vapor phase copper-free surface click-chemistry using the ALD technique
Different from other gas-phase methods, a novel pulsed vapor phase approach to copper-free surface click-chemistry by ALD processing is introduced.
2020 ◽
Vol 34
(19)
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pp. 2050178
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1975 ◽
Vol 53
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pp. 1744-1755
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2012 ◽
Vol 291
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pp. 483-500
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1998 ◽
Vol 195
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pp. 459-465
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2009 ◽
Vol 615-617
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pp. 453-456
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2021 ◽
Vol 2100
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pp. 012025
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