Point defect enhanced grain growth in silicon thin films: The role of ion bombardment and dopants

Applied Physics Letters ◽

10.1063/1.100303 ◽

1988 ◽

Vol 53 (22) ◽

pp. 2155-2157 ◽

Author(s):

Harry A. Atwater ◽

Carl V. Thompson

Keyword(s):

Point Defect ◽

Grain Growth ◽

Ion Bombardment ◽

Silicon Thin Films

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The role of point defects in ion-bombardment-enhanced and dopant-enhanced grain growth in silicon thin films

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(89)90742-8 ◽

1989 ◽

Vol 39 (1-4) ◽

pp. 64-67 ◽

Author(s):

Harry A. Atwater ◽

Carl V. Thompson ◽

Hyoung-June Kim

Keyword(s):

Grain Growth ◽

Point Defects ◽

Ion Bombardment ◽

Silicon Thin Films

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Bipolar HiPIMS: The role of capacitive coupling in achieving ion bombardment during growth of dielectric thin films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127152 ◽

2021 ◽

pp. 127152

Author(s):

Hao Du ◽

Michal Zanáška ◽

Nils Brenning ◽

Ulf Helmersson

Keyword(s):

Ion Bombardment ◽

Capacitive Coupling ◽

Dielectric Thin Films

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Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films

The European Physical Journal Applied Physics ◽

10.1051/epjap:2006094 ◽

2006 ◽

Vol 35 (3) ◽

pp. 165-172 ◽

Author(s):

A. Fontcuberta i Morral ◽

P. Roca i Cabarrocas

Keyword(s):

Hydrogen Diffusion ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2012.01.014 ◽

2012 ◽

Vol 358 (17) ◽

pp. 1974-1977 ◽

Author(s):

E.V. Johnson ◽

S. Pouliquen ◽

P.A. Delattre ◽

J.P. Booth

Keyword(s):

Ion Bombardment ◽

Microcrystalline Silicon ◽

Voltage Waveform ◽

Silicon Thin Films ◽

Bombardment Energy

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Grain Growth and Reaction in Nickel-Silicon Thin-Films

Berichte der Bunsengesellschaft für physikalische Chemie ◽

10.1002/bbpc.19910951117 ◽

1991 ◽

Vol 95 (11) ◽

pp. 1410-1413 ◽

Author(s):

P. Knauth ◽

A. Charaï ◽

C. Bergman ◽

P. Gas

Keyword(s):

Grain Growth ◽

Silicon Thin Films ◽

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Low temperature magnetron sputter deposition of polycrystalline silicon thin films using high flux ion bombardment

Journal of Applied Physics ◽

10.1063/1.2710301 ◽

2007 ◽

Vol 101 (6) ◽

pp. 063508 ◽

Author(s):

Jennifer E. Gerbi ◽

John R. Abelson

Keyword(s):

Low Temperature ◽

Polycrystalline Silicon ◽

Ion Bombardment ◽

Sputter Deposition ◽

High Flux ◽

Silicon Thin Films ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Role of Substrate Temperature on the Properties of Microcrystalline Silicon Thin Films

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.6284 ◽

2001 ◽

Vol 40 (Part 1, No. 11) ◽

pp. 6284-6289 ◽

Author(s):

Sumita Mukhopadhyay ◽

Subhas Chandra Saha ◽

Swati Ray

Keyword(s):

Substrate Temperature ◽

Microcrystalline Silicon ◽

Silicon Thin Films

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Reactive magnetron sputtering of transparent conductive oxide thin films: Role of energetic particle (ion) bombardment

Journal of Materials Research ◽

10.1557/jmr.2011.428 ◽

2012 ◽

Vol 27 (5) ◽

pp. 765-779 ◽

Author(s):

Klaus Ellmer ◽

Thomas Welzel

Keyword(s):

Magnetron Sputtering ◽

Energetic Particle ◽

Transparent Conductive Oxide ◽

Ion Bombardment ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Conductive Oxide ◽

Abstract

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Electrical and optical properties of semi-insulating polycrystalline silicon thin films: the role of microstructure and doping

Materials Science and Engineering R Reports ◽

10.1016/s0927-796x(96)00193-3 ◽

1996 ◽

Vol 17 (8) ◽

pp. 281-336 ◽

Author(s):

S LOMBARDO ◽

S CAMPISANO

Keyword(s):

Optical Properties ◽

Polycrystalline Silicon ◽

Electrical And Optical Properties ◽

Silicon Thin Films

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Role of the tip induced local anodic oxidation in the conductive atomic force microscopy of mixed phase silicon thin films

physica status solidi (c) ◽

10.1002/pssc.200982777 ◽

2010 ◽

pp. NA-NA ◽

Author(s):

Aliaksei Vetushka ◽

Antonin Fejfar ◽

Martin Ledinský ◽

Bohuslav Rezek ◽

Jiří Stuchlík ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Anodic Oxidation ◽

Mixed Phase ◽

Conductive Atomic Force Microscopy ◽

Force Microscopy ◽

Silicon Thin Films ◽

Atomic Force ◽

Local Anodic Oxidation

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