Bipolar HiPIMS: The role of capacitive coupling in achieving ion bombardment during growth of dielectric thin films

One measure of the maturity of a device technology is the ease and reliability of applying contact metallurgy. Compared to metal contact of silicon, the status of GaAs metallization is still at its primitive stage. With the advent of GaAs MESFET and integrated circuits, very stringent requirements were placed on their metal contacts. During the past few years, extensive researches have been conducted in the area of Au-Ge-Ni in order to lower contact resistances and improve uniformity. In this paper, we report the results of TEM study of interfacial reactions between Ni and GaAs as part of the attempt to understand the role of nickel in Au-Ge-Ni contact of GaAs.N-type, Si-doped, (001) oriented GaAs wafers, 15 mil in thickness, were grown by gradient-freeze method. Nickel thin films, 300Å in thickness, were e-gun deposited on GaAs wafers. The samples were then annealed in dry N2 in a 3-zone diffusion furnace at temperatures 200°C - 600°C for 5-180 minutes. Thin foils for TEM examinations were prepared by chemical polishing from the GaA.s side. TEM investigations were performed with JE0L- 100B and JE0L-200CX electron microscopes.

Download Full-text

Transmission Electron Microscopy studies of texture of Cr underlayer of magnetic recording hard disk

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100087215 ◽

1991 ◽

Vol 49 ◽

pp. 580-581

Author(s):

L. Tang ◽

G. Thomas ◽

M. R. Khan ◽

S. L. Duan

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Magnetic Recording ◽

Magnetic Thin Films ◽

Magnetic Films ◽

Substrate Bias ◽

Epitaxial Relationship ◽

Transmission Electron

Cr thin films are often used as underlayers for Co alloy magnetic thin films, such as Co1, CoNi2, and CoNiCr3, for high density longitudinal magnetic recording. It is belived that the role of the Cr underlayer is to control the growth and texture of the Co alloy magnetic thin films, and, then, to increase the in plane coercivity of the films. Although many epitaxial relationship between the Cr underlayer and the magnetic films, such as ﹛1010﹜Co/ {110﹜Cr4, ﹛2110﹜Co/ ﹛001﹜Cr5, ﹛0002﹜Co/﹛110﹜Cr6, have been suggested and appear to be related to the Cr thickness, the texture of the Cr underlayer itself is still not understood very well. In this study, the texture of a 2000 Å thick Cr underlayer on Nip/Al substrate for thin films of (Co75Ni25)1-xTix dc-sputtered with - 200 V substrate bias is investigated by electron microscopy.

Download Full-text

Transmission Electron Microscopy of Evaporated Perylene Thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100135289 ◽

1990 ◽

Vol 48 (2) ◽

pp. 336-337

Author(s):

C. Ewins ◽

J.R. Fryer

Keyword(s):

Electron Microscopy ◽

Thin Films ◽

Transmission Electron Microscopy ◽

Molecular Electronics ◽

High Vacuum ◽

Amorphous Layer ◽

Electric Heater ◽

Transmission Electron ◽

Polycyclic Aromatic

The preparation of thin films of organic molecules is currently receiving much attention because of the need to produce good quality thin films for molecular electronics. We have produced thin films of the polycyclic aromatic, perylene C10H12 by evaporation under high vacuum onto a potassium chloride (KCl) substrate. The role of substrate temperature in determining the morphology and crystallography of the films was then investigated by transmission electron microscopy (TEM).The substrate studied was the (001) face of a freshly cleaved crystal of KCl. The temperature of the KCl was controlled by an electric heater or a cold finger. The KCl was heated to 200°C under a vacuum of 10-6 torr and allowed to cool to the desired temperature. The perylene was then evaporated over a period of one minute from a molybdenum boat at a distance of 10cm from the KCl. The perylene thin film was then backed with an amorphous layer of carbon and floated onto copper microscope grids.

Download Full-text

Ion Beam Mixing of Ni-Ti Bilayered Thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100118345 ◽

1985 ◽

Vol 43 ◽

pp. 290-291

Author(s):

A. K. Rai ◽

R. S. Bhattacharya ◽

M. H. Rashid

Keyword(s):

Crystal Structure ◽

Thin Films ◽

Amorphous Alloys ◽

Ion Beam ◽

Ion Bombardment ◽

High Energy ◽

Mixing Efficiency ◽

Ion Beam Mixing ◽

Enhanced Diffusion ◽

Binary Metal

Ion beam mixing has recently been found to be an effective method of producing amorphous alloys in the binary metal systems where the two original constituent metals are of different crystal structure. The mechanism of ion beam mixing are not well understood yet. Several mechanisms have been proposed to account for the observed mixing phenomena. The first mechanism is enhanced diffusion due to defects created by the incoming ions. Second is the cascade mixing mechanism for which the kinematicel collisional models exist in the literature. Third mechanism is thermal spikes. In the present work we have studied the mixing efficiency and ion beam induced amorphisation of Ni-Ti system under high energy ion bombardment and the results are compared with collisional models. We have employed plan and x-sectional veiw TEM and RBS techniques in the present work.

Download Full-text