Effect of rapid thermal annealing on the electrical and physical properties of metalorganic chemical‐vapor‐deposited TiN
1995 ◽
Vol 34
(Part 1, No. 12A)
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pp. 6321-6325
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Keyword(s):
1991 ◽
Vol 138
(6)
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pp. 1846-1849
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Keyword(s):
Keyword(s):
2009 ◽
Vol 149
(45-46)
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pp. 2013-2016
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