Measurement of Si, SiF, and SiF2 radicals and SiF4 molecule using very high frequency capacitively coupled plasma employing SiF4

Journal of Applied Physics ◽

10.1063/1.1592011 ◽

2003 ◽

Vol 94 (3) ◽

pp. 1428-1435 ◽

Author(s):

Takayuki Ohta ◽

Ken-ichiro Hara ◽

Tetsuro Ishida ◽

Masaru Hori ◽

Toshio Goto ◽

...

Keyword(s):

High Frequency ◽

Very High Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

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Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma

Physics of Plasmas ◽

10.1063/5.0022844 ◽

2020 ◽

Vol 27 (11) ◽

pp. 110701

Author(s):

C. Harvey ◽

N. Sirse ◽

C. Gaman ◽

A. R. Ellingboe

Keyword(s):

High Frequency ◽

Low Pressure ◽

Mode Transition ◽

Very High Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

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Dependence of Surface-Loss Probability of Hydrogen Atom on Pressures in Very High Frequency Parallel-Plate Capacitively Coupled Plasma

Applied Physics Express ◽

10.1143/apex.3.106001 ◽

2010 ◽

Vol 3 (10) ◽

pp. 106001 ◽

Author(s):

Yusuke Abe ◽

Sho Kawashima ◽

Keigo Takeda ◽

Makoto Sekine ◽

Masaru Hori

Keyword(s):

Hydrogen Atom ◽

High Frequency ◽

Parallel Plate ◽

Loss Probability ◽

Very High Frequency ◽

Capacitively Coupled ◽

Surface Loss ◽

Capacitively Coupled Plasma ◽

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High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abbac2 ◽

2020 ◽

Vol 29 (11) ◽

pp. 114001

Author(s):

Sarveshwar Sharma ◽

Nishant Sirse ◽

Miles M Turner

Keyword(s):

Harmonic Generation ◽

High Frequency ◽

Low Pressure ◽

Very High Frequency ◽

Capacitively Coupled ◽

Higher Harmonic Generation ◽

Higher Harmonic ◽

Capacitively Coupled Plasma ◽

Very High ◽

Sawtooth Waveform

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Relationship between center-peaked plasma density profiles and harmonic electromagnetic waves in very high frequency capacitively coupled plasma reactors

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.03db01 ◽

2014 ◽

Vol 53 (3S2) ◽

pp. 03DB01 ◽

Author(s):

Ikuo Sawada ◽

Peter L. G. Ventzek ◽

Barton Lane ◽

Tatsuro Ohshita ◽

Rochan R. Upadhyay ◽

...

Keyword(s):

Plasma Density ◽

High Frequency ◽

Electromagnetic Waves ◽

Plasma Reactors ◽

Very High Frequency ◽

Density Profiles ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

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Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.3296349 ◽

2010 ◽

Vol 107 (5) ◽

pp. 053302 ◽

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Jason Kenney ◽

Leonid Dorf ◽

Ken Collins

Keyword(s):

Magnetic Field ◽

High Frequency ◽

Inhomogeneous Magnetic Field ◽

Very High Frequency ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

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Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor

Journal of Applied Physics ◽

10.1063/1.5024835 ◽

2018 ◽

Vol 123 (22) ◽

pp. 223304 ◽

Author(s):

Dao-Man Han ◽

Yong-Xin Liu ◽

Fei Gao ◽

Xiang-Yu Wang ◽

Ang Li ◽

...

Keyword(s):

Fiber Bragg Grating ◽

Standing Wave ◽

High Frequency ◽

Very High Frequency ◽

Wave Effect ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Bragg Grating Sensor ◽

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Effects of Driving Frequency on the Translational Temperature and Absolute Density of Si Atoms in Very High Frequency Capacitively Coupled SiF4Plasmas

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l1532 ◽

2003 ◽

Vol 42 (Part 2, No. 12B) ◽

pp. L1532-L1534 ◽

Author(s):

Takayuki Ohta ◽

Masaru Hori ◽

Tetsuro Ishida ◽

Toshio Goto ◽

Masafumi Ito ◽

...

Keyword(s):

High Frequency ◽

Driving Frequency ◽

Very High Frequency ◽

Capacitively Coupled ◽

Translational Temperature ◽

Absolute Density ◽

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Effects of Ar Dilution and Exciting Frequency on Absolute Density and Translational Temperature of Si Atom in Very High Frequency-Capacitively Coupled SiH4Plasmas

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.l94 ◽

2003 ◽

Vol 43 (1A/B) ◽

pp. L94-L96 ◽

Author(s):

Takayuki Ohta ◽

Tetsuro Ishida ◽

Masaru Hori ◽

Toshio Goto ◽

Masafumi Ito ◽

...

Keyword(s):

High Frequency ◽

Very High Frequency ◽

Capacitively Coupled ◽

Translational Temperature ◽

Exciting Frequency ◽

Absolute Density ◽

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Experimental and numerical studies on voltage distribution in capacitively coupled very high-frequency plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/13/3/010 ◽

2004 ◽

Vol 13 (3) ◽

pp. 436-445 ◽

Author(s):

Koji Satake ◽

Hideo Yamakoshi ◽

Matsuhei Noda

Keyword(s):

High Frequency ◽

Voltage Distribution ◽

Very High Frequency ◽

Capacitively Coupled ◽

Numerical Studies ◽

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Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3151821 ◽

2009 ◽

Vol 27 (4) ◽

pp. 706-711 ◽

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Kartik Ramaswamy ◽

Ken Collins

Keyword(s):

High Frequency ◽

Very High Frequency ◽

Capacitively Coupled ◽

Interelectrode Gap ◽

Coupled Plasmas ◽

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