Technique for Calculating X‐Ray Intensities in the Electron Probe Microanalyzer

1960 ◽  
Vol 31 (7) ◽  
pp. 1297-1298 ◽  
Author(s):  
L. S. Birks
1999 ◽  
Vol 5 (S2) ◽  
pp. 78-79
Author(s):  
C. Merlet ◽  
X. Llovet ◽  
F. Salvat

Studies of x-ray emission from thin films on substrates using an electron probe microanalyzer (EPMA) provide useful information on the characteristics of x-ray generation by electron beams. In this study, EPMA measurements of multilayered samples were performed in order to test and improve analytical and numerical models used for quantitative EPMA. These models provide relatively accurate results for samples consisting of layers with similar average atomic numbers, because of their similar properties regarding electron transport and x-ray generation. On the contrary, these models find difficulties to describe the process when the various layers have very different atomic numbers. In a previous work, we studied the surface ionization of thin copper films of various thicknesses deposited on substrates with very different atomic numbers. In the present communication, the study is extended to the case of multilayered specimens.The studied specimens consisted of thin copper films deposited on a carbon layer which, in turn, was placed on a variety of single-element substrates, ranging from Be to Bi.


1998 ◽  
Vol 4 (S2) ◽  
pp. 274-275
Author(s):  
E. A. Kenik ◽  
S. X. Ren

Whereas the spatial resolution for standard secondary electron (SEI) imaging in a scanning electron microscope or electron probe microanalyzer is related to the incident probe diameter, the spatial resolution for x-ray microanalysis is related to the convolution of the probe diameter with the spatial extent of the analyzed volume for a point probe. The latter is determined by electron scattering in the specimen and the subsequent emission of excited x-rays from the specimen. As such, it is possible that “What you see is not what you get”. This is especially true for instruments with high brightness electron sources (field emission). This problem is compounded by probe aberrations which at Gaussian image focus can produce significant electron tails extending tens of microns from the center of the probe.


Author(s):  
Tomura ◽  
Okano ◽  
Hara

The recent advancement in scientific instrumentation has been phenomenal. This is particularity true in the electron probe microanalyzer field. This paper describes the improvements made in the Hitachi Model XMA-5 Electron Probe Microanalyzer to achieve high performance.1.X-ray spectroscopy1-1.It is now possible to analyze a wide variety of elements including ultra light elements in minute concentrations with the advent of an increasing number of dispersing elements and high detectability.1-2.A linear crystal drive and direct wavelength read-out (with respect to the crystal) is employed in the spectrometer to assure simultaneous analyses of up to three elements by using three of the six crystals provided. For correction of absorbed X-rays and fluorescence excitation and with due consideration of the angular distribution of the characteristic X-rays, an X-ray take off angle of 38° (electron probe is incident vertically on the specimen surface) was adopted.


1961 ◽  
Vol 5 ◽  
pp. 512-515 ◽  
Author(s):  
Robert D. Sloan

AbstractFrequently it is desirable to perform an X-ray spectrographic analysis on an area of a specimen which is considerably smaller than that normally irradiated in bulk-production spectrographs. Ideally, one would turn to an electron-beam microanalyzer for this type of analysis. Unfortunately, there are few of us who can justify the expenditure necessary to equip our laboratories with this instrument. Therefore, a compromise measure has been arrived at which permits the analyst to examine an area many magnitudes smaller than that obtainable from production spectrographs and many magnitudes less expensive than that encountered in electron-probe microanalyzer instrumentation.


1965 ◽  
Vol 9 ◽  
pp. 208-220 ◽  
Author(s):  
Kurt F. J. Heinrich ◽  
Donald Vieth ◽  
Harvey Yakowitz

AbstractWhile the theoretical basis for the correction of non-linearity of detector systems is well known, methods for the determination of dead-time effects must be adapted to electron probe microanalyzer systems. Two such methods, one employing both X-ray and current measurements and the other employing simultaneous X-ray measurements on two spectrometers, are described. The effect of pulse-height shrinkage at high counting rates on the linearity of the detector system is discussed. When the proposed corrections for the dead-time of X-ray detector systems employing proportional counters are applied to the X-ray intensity measurements obtained with the electron probe microanalyzer, count rates as high as 50,000 counts/sec can be used.


1965 ◽  
Vol 9 ◽  
pp. 487-503
Author(s):  
A. K. Baird ◽  
D. H. Zenger

AbstractThe major elements m common rocks are of low atomic number, but analyses of high precision are possible by soft X-ray spectrography if several grams of rock sample are available. The electron-probe microanalyzer is shown to complement this established method by permitting analyses of particles as small as 1 μ in diameter. This paper describes applications of these methods to the analysis of the major and minor elements of silicate, carbonate, and phosphate minerals and rocks.Elements of particular interest are as follows : carbon in particles enclosed in carbonate rocks; oxygen, as the major constituent of the specimens; phosphorus in phosphatic nodules and apatites; manganese and iron, as colorations in fossil shells; and the group oxygen, sodium, magnesium, aluminum, silicon, potassium, calcium, and iron as complex segregations and zonations within single crystals of several mineral phases.If the bulk composition of a rock is known, and also the chemistry of the constituent minerals, it is possible to compute quantitative minéralogie analyses of high precision. Thus, the combined use of soft X-ray spectrography and electronprobe microanalysis can provide quantitative chemical and mineralogicat information on the earth's crust on all scales from thousands of square miles (by means of appropriate sampling) down to the scale of 1 μ.


2010 ◽  
Vol 65 (3) ◽  
pp. 249-254 ◽  
Author(s):  
V. N. Korolyuk ◽  
Yu. G. Lavrent’ev ◽  
L. V. Usova ◽  
E. N. Nigmatulina

2017 ◽  
Vol 23 (6) ◽  
pp. 1143-1149 ◽  
Author(s):  
Susumu Imashuku ◽  
Koichiro Ono ◽  
Kazuaki Wagatsuma

AbstractThe potential of the application of an X-ray excited optical luminescence (XEOL) analyzer and portable analyzers, composed of a cathodoluminescence (CL) spectrometer and electron probe microanalyzer (EPMA), to the on-line and on-site analysis of nonmetallic inclusions in steel is investigated as the first step leading to their practical use. MgAl2O4 spinel and Al2O3 particles were identified by capturing the luminescence as a result of irradiating X-rays in air on a model sample containing MgAl2O4 spinel and Al2O3 particles in the size range from 20 to 50 μm. We were able to identify the MgAl2O4 spinel and Al2O3 particles in the same sample using the portable CL spectrometer. In both cases, not all of the particles in the sample were identified because the luminescence intensities of the smaller Al2O3 in particular were too low to detect. These problems could be solved by using an X-ray tube with a higher power and increasing the beam current of the portable CL spectrometer. The portable EPMA distinguished between the MgAl2O4 spinel and Al2O3 particles whose luminescent colors were detected using the portable CL spectrometer. Therefore, XEOL analysis has potential for the on-line analysis of nonmetallic inclusions in steel if we have information on the luminescence colors of the nonmetallic inclusions. In addition, a portable EPMA–CL analyzer would be able to perform on-site analysis of nonmetallic inclusions in steel.


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