Hitachi Model XMA-5 Electron Probe Microanalyzer
The recent advancement in scientific instrumentation has been phenomenal. This is particularity true in the electron probe microanalyzer field. This paper describes the improvements made in the Hitachi Model XMA-5 Electron Probe Microanalyzer to achieve high performance.1.X-ray spectroscopy1-1.It is now possible to analyze a wide variety of elements including ultra light elements in minute concentrations with the advent of an increasing number of dispersing elements and high detectability.1-2.A linear crystal drive and direct wavelength read-out (with respect to the crystal) is employed in the spectrometer to assure simultaneous analyses of up to three elements by using three of the six crystals provided. For correction of absorbed X-rays and fluorescence excitation and with due consideration of the angular distribution of the characteristic X-rays, an X-ray take off angle of 38° (electron probe is incident vertically on the specimen surface) was adopted.