Size-selected cluster beam source based on radio frequency magnetron plasma sputtering and gas condensation

2005 ◽  
Vol 76 (4) ◽  
pp. 045103 ◽  
Author(s):  
S. Pratontep ◽  
S. J. Carroll ◽  
C. Xirouchaki ◽  
M. Streun ◽  
R. E. Palmer
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Cluster Beam ◽  
Beam Source ◽  
Gas Condensation ◽  
Plasma Sputtering

Energy band structure of Ru/(Ba,Sr)TiO3/Si capacitor deposited by inductively-coupled plasma-assisted radio-frequency-magnetron plasma sputtering

2002 ◽  
Vol 81 (15) ◽  
pp. 2821-2823 ◽  
Author(s):  
Takamaro Kikkawa ◽  
Naonori Fujiwara ◽  
Hiroshi Yamada ◽  
Seiichi Miyazaki ◽  
Fumitaka Nishiyama ◽  
...  
Keyword(s):  
Band Structure ◽  
Radio Frequency ◽  
Energy Band ◽  
Inductively Coupled Plasma ◽  
Energy Band Structure ◽  
Radio Frequency Magnetron ◽  
Inductively Coupled ◽  
Plasma Sputtering
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